@article{CTT100821117, author = {Takehiko Kikuchi and Liu Bai and Takuya Mitarai and Hideki Yagi and Masato Furukawa and Tomohiro Amemiya and Nobuhiko Nishiyama and Shigehisa Arai}, title = {Enhanced bonding strength of InP/Si chip-on-wafer by plasma-activated bonding using stress-controlled interlayer}, journal = {Japanese Journal of Applied Physics}, year = 2019, } @inproceedings{CTT100803284, author = {菊地 健彦 and 白 柳 and 御手洗 拓矢 and 八木 英樹 and 新田 俊之 and 古川 将人 and 雨宮 智宏 and 西山 伸彦}, title = {引張り歪層によるSi基板上InP小片接合界面の垂直応力抑制}, booktitle = {}, year = 2019, } @inproceedings{CTT100803261, author = {Takayuki Miyazaki and Fumihito Tachibana and Takehiko Kikuchi and Takuo Hiratani and Hideki Yagi and Moataz Eissa and Takuya Mitarai and Tomohiro Amemiya and Nobuhiko Nishiyama and Shigehisa Arai}, title = {Taper Length Dependence of Double-Taper-Type Coupler for GaInAsP/SOI Hybrid Integrated Platform}, booktitle = {}, year = 2019, } @inproceedings{CTT100803265, author = {Takehiko Kikuchi and Liu Bai and Takuya Mitarai and Hideki Yagi and Tomohiro Amemiya and Nobuhiko Nishiyama and Shigehisa Arai}, title = {High Yield Chip-on-wafer Low Temperature Plasma Activated Bonding for III-V/Si Hybrid Photonic Integration}, booktitle = {}, year = 2019, } @inproceedings{CTT100803289, author = {宮嵜 隆之 and 立花 文人 and 菊地 健彦 and 平谷 拓生 and 八木 英樹 and Moataz Eissa and 御手洗 拓矢 and 雨宮 智宏 and 西山 伸彦 and 荒井 滋久}, title = {III-V/Siハイブリッド集積プラットホーム実現に向けたハイブリッド/シリコン領域2段テーパ導波路のテーパ構造依存性}, booktitle = {}, year = 2019, } @inproceedings{CTT100803297, author = {白 柳 and 菊地 健彦 and 御手洗 拓矢 and 西山 伸彦 and 八木 英樹 and 雨宮 智宏 and 荒井 滋久}, title = {Investigation of stress dependence on bonding strength for III-V/Si chip-on-wafer by plasma activated bonding}, booktitle = {}, year = 2019, }