@inproceedings{CTT100873967,
  author = {Takumi Akiyama and Chun-Yi Chen and Tomoyuki Kurioka and Tso-Fu Mark Chang and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Impurities Analysis of the Gold Components in MEMS Accelerometer by TDS},
  booktitle = {},
  year = 2022,
}

@inproceedings{CTT100865533,
  author = {秋⼭ 拓海 and CHIENYu-An and Chun-Yi Chen and Tso-Fu Chang and 伊藤浩之 and 町⽥克之 and 三宅美博 and 曽根正⼈},
  title = {MEMSデバイスへの応⽤に向けた⾦ニッケル合⾦の微⼩機械的特性 の評価},
  booktitle = {},
  year = 2022,
}