@article{CTT100902767,
  author = {Takumi Akiyama and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Impurity Analysis of Electroplated Gold Components with Multi-Layered Structures by Thermal Desorption Spectrometry toward Application in Gold Micro Electro Mechanical System Capacitive Accelerometers  },
  journal = {Micro and Nano Engineering},
  year = 2023,
}