@inproceedings{CTT100692512,
  author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Study on Ti/Au Two-Layered Cantilevers with different Aspect Ratio for MEMS Devices},
  booktitle = {SSDM2015, 2015 International Conference on Solid State Devises and Materials},
  year = 2015,
}

@inproceedings{CTT100691819,
  author = {Daisuke Yamane and Toshifumi Konishi and Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Hiroshi Toshiyoshi and Kazuya Masu and Masato Sone and Katsuyuki Machida},
  title = {A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology},
  booktitle = {AMC2015},
  year = 2015,
}

@inproceedings{CTT100693804,
  author = {Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Structure Stability of High Aspect Ratio Ti/Au Two-Layered Cantilevers for Applications in MEMS Accelerometers},
  booktitle = {MNE2015, The 41th International Conference on Micro and Nano Engineering},
  year = 2015,
}

@inproceedings{CTT100695302,
  author = {Daisuke Yamane and Toshifumi Konishi and Minami Teranishi and Tso-Fu Mark Chang and Chun-Yi Chen and Hiroshi Toshiyoshi and Kazuya Masu and Masato Sone and Katsuyuki Machida},
  title = {A Study on Mechanical Structure of a MEMS Accelerometer Fabricated by Multi-layer Metal Technology},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100695298,
  author = {寺西美波 and Tso-Fu Mark Chang and 小西敏文 and 松島隆明 and 町田克之 and 年吉 洋 and 山根大輔 and 伊藤浩之 and 益 一哉 and 曽根正人},
  title = {電解金めっきで作製したMEMSデバイスにおける動作構造安定性},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100692272,
  author = {寺西美波 and Chang Tso-Fu Mark and 山根大輔 and 小西敏文 and 松島隆明 and 伊藤浩之 and 年吉 洋 and 町田克之 and 益 一哉 and 曽根正人},
  title = {電解金めっきで作製した微小カンチレバーの形状安定性評価},
  booktitle = {},
  year = 2015,
}

@inproceedings{CTT100682962,
  author = {Minami Teranishi and Tso-Fu Mark Chang and Toshifumi Konishi and Masaki Yano and Katsuyuki Machida and Daisuke Yamane and Hiroyuki Ito and Kazuya Masu and Tatsuo Sato and Masato Sone},
  title = {Stability of Movable Structure Formed by Au Electroplating for MEMS Devices},
  booktitle = {ICMAT2015 & IUMRS-ICA2015,},
  year = 2015,
}