@article{CTT100908961,
  author = {Kisuke Miyado and Devi Srujana  Tenneti and Akira Onishi and Katsuyuki Machida and Tomoyuki Kurioka and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito},
  title = {Serpentine Spring Design Technique for High Sensitivity MEMS Capacitive Accelerometer Fabricated by Gold Multi-layer Metal Technology},
  journal = {Japanese Journal of Applied Physics},
  year = 2024,
}

@inproceedings{CTT100917498,
  author = {Syunkai Watanabe and Shunkai Watanabe and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Tenneti Devi Srujana and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone},
  title = {Dependence of Applied Voltage on Effective Young’s Modulus of  Ti/Au Multi-Layered Micro-Cantilevers for MEMS Capacitive Accelerometers},
  booktitle = {50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)},
  year = 2024,
}

@inproceedings{CTT100917601,
  author = {Kisuke Miyado and Torauto Yamada and Devi Srujana Tenneti and Chihaya Mukaide and Katsuyuki Machida and Tomoyuki Kurioka and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito},
  title = {Effect of Perforated Proof-Mass Hole Size on Device Characteristics of Gold Single-Axis MEMS Accelerometer for Micro-g Level Sensing},
  booktitle = {50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)},
  year = 2024,
}

@inproceedings{CTT100917604,
  author = {Devi Srujana Tenneti and Kisuke Miyado and Chihaya Mukaide and Torauto Yamada and Katsuyuki Machida and Tomoyuki Kurioka and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito},
  title = {Suppression of Warpage in Perforated Proof-Mass of Gold Single-Axis MEMS Accelerometers for Micro-g Level Sensing},
  booktitle = {50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)},
  year = 2024,
}