@inproceedings{CTT100909158, author = {Takaaki Kubo and KAZUHIRO YOSHIDA and Joon-wan KIM}, title = {A High Power Micropump Using Micro Sheet Valves}, booktitle = {2023 26th Int. Conf. on Mechatronics Technology (ICMT) (IEEE Xplore)}, year = 2023, } @inproceedings{CTT100904021, author = {久保 隆顕 and 吉田 和弘 and 金 俊完}, title = {マイクロシートバルブを用いた高出力空気圧マイクロポンプに関する研究}, booktitle = {2023年度年次大会 予稿集}, year = 2023, }