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中島英亮 2018年 研究業績一覧 (5件 / 13件)
国際会議発表 (査読有り)
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Hideaki Nakajima,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
Young’s Modulus of Ti/Au Micro-Cantilever by Resonance Frequency Method toward Au-Based MEMS Device,
44rd International Conference on Micro & Nano Engineering (MNE2018),
44rd International Conference on Micro & Nano Engineering (MNE2018),
Sept. 2018.
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Masato Sone,
Hideaki Nakajima,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Hiroyuki Ito,
Kazuya Masu.
EFFECTIVE YOUNG’S MODULUS EVALUATION OF TI/AU MICRO STRUCTURES FOR MEMS ACCELEROMETER,
8th research workshop "NEW METHODS OF DAMAGE AND FAILURE ANALYSIS OF STRUCTURAL PARTS",
8th research workshop "NEW METHODS OF DAMAGE AND FAILURE ANALYSIS OF STRUCTURAL PARTS",
Sept. 2018.
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HIdeaki Nakajima,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
HIroshi Toshiyoshi,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
A Study on Effective Young’s Modulus of Micro-Cantilevers Fabricated by Au Electroplating,
The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan,
Nano Engineering and Microsystem Technology Conference, Taiwan,
June 2018.
国内会議発表 (査読有り)
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中島 英亮,
Tso-Fu Mark Chang,
Chun-Yi Chen,
山根 大輔,
小西 敏文,
町田 克之,
年吉 洋,
益 一哉,
曽根 正人.
MEMS加速度センサに向けた金めっき微小カンチレバーのヤング率 に関する検討,
第79回応用物理学会秋季学術講演会,
第79回応用物理学会秋季学術講演会,
Sept. 2018.
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中島英亮,
Chun-Yi Chen,
Tso-Fu Mark Chang,
⼭根⼤輔,
小西敏文,
町⽥ 克之,
年吉洋,
益 ⼀哉,
曽根 正⼈.
電解めっき法によるTi/Au微⼩カンチレバーのヤング率評価,
応用物理学会第65回春季講演会,
応用物理学会第65回春季講演会,
Mar. 2018.
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