@inproceedings{CTT100778335,
  author = {Akihiro Matsutani and Mina Sato and KOICHI HASEBE and Ayako Takada},
  title = {Microfabrication of Si-based Concave Micromirror Array for Microbial Cell Trapping by XeF2 Vapor Etching},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100771843,
  author = {松谷晃宏 and 佐藤美那 and 長谷部浩一 and 高田綾子},
  title = {XeF2気相エッチングにより製作した 微生物細胞捕獲用Siマイクロ凹面鏡の集光実験},
  booktitle = {},
  year = 2018,
}