@article{CTT100458036, author = {Atsutoshi Makihira and H.Sekiguchi and A.Kanzawa and T.Honda}, title = {EFFECT OF PERIODIC ADDITION OF HYDROGEN GAS ON NITRIDING OF TITANIUM PLATE USING AN RF PLASMA}, journal = {第4回プラズマ化学合同シンポジウム アブストラクト集}, year = 1991, } @article{CTT100458037, author = {H.Sekiguchi and T.Honda and A.Kanzawa}, title = {DECOMPOSITION OF CHLOROFLUOROCARBONS USING A THERMAL ARGON PLASMA}, journal = {Proc. 10th Int. Symp. Plasma Chem}, year = 1991, }