@article{CTT100830612, author = {"K. Tuokedaerhan" and "R. Tan and K. Kakushima" and "P. Ahmet" and "Y. Kataoka" and "A. Nishiyama" and "N. Sugii" and "H. Wakabayashi" and "K. Tsutsui" and "K. Natori" and "T. Hattori" and "H. Iwai"}, title = {Stacked sputtering process for Ti, Ta, and W carbide formation for gate metal application}, journal = {Applied Physics Letters (APL)}, year = 2013, } @article{CTT100830613, author = {"Keita Takahashi" and "Kazuo Tsutsui"}, title = {Growth of Thin Epitaxial CaxSr1-xF2/SrF2 Layers with Low Leakage Current on Ge Substrates}, journal = {Japanese Journal of Applied Physics (JJAP)}, year = 2013, } @article{CTT100658805, author = {Takamasa Kawanago and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and takeo hattori and Kenji Natori and HIROSHI IWAI}, title = {Comparative study of electrical characteristics in(100) and (110)surface-oriented nMOSFETs with direct contact La-silicate/Si interface structure}, journal = {Solid-State Electronics}, year = 2013, } @article{CTT100658722, author = {Y. Wu and 竇春萌 and F. Wei and Kuniyuki KAKUSHIMA and 大毛利健治 and パールハットアヘメト and T. Watanabe and KAZUO TSUTSUI and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and Keisaku Yamada and 片岡好則 and takeo hattori and HIROSHI IWAI}, title = {Influence of Structural Parameters on Electrical Characteristics of Schottky Tunneling Field-Effect Transistor and Its Scalability}, journal = {Japanese Journal of Applied Physics}, year = 2013, } @article{CTT100658723, author = {DARYOUSH ZADEH and Hiroshi Oomine and Yuya Suzuki and Kuniyuki KAKUSHIMA and パールハットアヘメト and Hiroshi Nohira and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {La2O3/Ino.53Ga.0.47As metal-oxide-semiconductor capacitor with low interface state density using TiN/W gate alectrode}, journal = {Solid-State Electronics}, year = 2013, } @inproceedings{CTT100669175, author = {Hiroshi Oomine and DARYOUSH ZADEH and Kuniyuki KAKUSHIMA and 片岡好則 and 西山彰 and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Electrical characterization of atomic layer deposited La2O3 films on In0.53Ga0.47AAs substrates}, booktitle = {ECS Transactions}, year = 2013, } @inproceedings{CTT100669354, author = {Taichi Inamura and 佐々木亮人 and 青木克明 and Kuniyuki KAKUSHIMA and 片岡好則 and 西山彰 and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {A stacked sputtered process for β-FeSi2 formation}, booktitle = {ECS Transactions}, year = 2013, } @inproceedings{CTT100669355, author = {Taichi Inamura and 佐々木亮人 and 青木克明 and Kuniyuki KAKUSHIMA and 片岡好則 and 西山彰 and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {A stacked sputtered process for β-FeSi2 formation}, booktitle = {ECS Transactions}, year = 2013, } @inproceedings{CTT100830488, author = {Shuhei Hosoda and Kamale Tuokedaerhan and Kuniyuki Kakushima and Yoshinori Kataoka and Akira Nishiyama and Nobuyuki Sugii and Hitoshi Wakabayashi and Kazuo Tsutsui and Kenji Natori and Hiroshi Iwai}, title = {Reliability of La-Silicate Mos Capacitors With Tungsten Carbide Gate Electrode}, booktitle = {}, year = 2013, } @inproceedings{CTT100669173, author = {Shuhei Hosoda and K. Tuokedaerhan and Kuniyuki KAKUSHIMA and 片岡好則 and 西山彰 and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Reliability of La-silicate MOS capacitors with tungsten carbide gate electrode for scaled EOT}, booktitle = {ECS Transactions}, year = 2013, } @inproceedings{CTT100669174, author = {宋 禛漢 and Kazuki Matsumoto and Kuniyuki KAKUSHIMA and 片岡好則 and 西山彰 and 杉井信之 and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Resistivity of Ni silicide nanowires and its dependence on Ni film thickness used for the formation}, booktitle = {ECS Transactions}, year = 2013, } @inproceedings{CTT100830490, author = {T. Seki and T. Kawanago and K. Kakushima and P. Ahmet and Y. Kataoka and A. Nishiyama and N. Sugii and K. Tsutsui and K. Natori and T. Hattori and H. Iwai}, title = {Electrical and Infrared Absorption Studies on La-silicate/Si Interface}, booktitle = {}, year = 2013, } @inproceedings{CTT100830492, author = {K. Tsutsui}, title = {Analyses of Electrical Activation and Deactivation of Impurities Doped in Scaled-down Si Device Structures by X-ray Photoelectron Spectroscopy}, booktitle = {}, year = 2013, } @inproceedings{CTT100654582, author = {Ryuji Hosoi and Yuya Suzuki and ダリューシュザデ and Kuniyuki KAKUSHIMA and パールハットアヘメト and Akira Nishiyama and 杉井信之 and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {A novel interpretation of frequency dispersed capacitances in InGaAs capacitor by conductance method}, booktitle = {}, year = 2013, } @inproceedings{CTT100654583, author = {Wei Li and Kuniyuki KAKUSHIMA and パールハットアヘメト and Akira Nishiyama and 杉井信之 and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Interface state density measurements of 3D silicon channel by charge pumping method}, booktitle = {}, year = 2013, } @inproceedings{CTT100654585, author = {shinichi kano and 竇春萌 and unknown unknown and Kuniyuki KAKUSHIMA and パールハットアヘメト and Akira Nishiyama and 杉井信之 and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Impact of metal electrode material on resistive switching properties of Ce oxides}, booktitle = {}, year = 2013, } @inproceedings{CTT100654588, author = {田中祐樹 and Kuniyuki KAKUSHIMA and パールハットアヘメト and Akira Nishiyama and 杉井信之 and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Impact of annealing on structural change in amorphous carbon: effect of Fe catalyst}, booktitle = {}, year = 2013, } @inproceedings{CTT100654590, author = {Yuta Tamura and 吉原亮 and Kuniyuki KAKUSHIMA and パールハットアヘメト and 西山彰 and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {A novel Ni silicidation technology for Schottky diode formation}, booktitle = {}, year = 2013, } @inproceedings{CTT100654591, author = {Kana Tsuneishi and Miyuki Kouda and Kuniyuki KAKUSHIMA and パールハットアヘメト and Akira Nishiyama and 杉井信之 and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Electrical properties of Tm2O3 gate dielectric and its scaling issues}, booktitle = {}, year = 2013, } @inproceedings{CTT100654592, author = {Michihiro Hosoda and Yeonghun Lee and Kuniyuki KAKUSHIMA and パールハットアヘメト and Akira Nishiyama and 杉井信之 and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Size dependent phonon limited electron mobility of Si nanowire}, booktitle = {}, year = 2013, } @inproceedings{CTT100654593, author = {Kazuki Matsumoto and 小山将央 and Kuniyuki KAKUSHIMA and パールハットアヘメト and Akira Nishiyama and 杉井信之 and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Ni silicidation for Si fin and nanowire structures}, booktitle = {}, year = 2013, } @inproceedings{CTT100654594, author = {吉原亮 and Yuta Tamura and Kuniyuki KAKUSHIMA and パールハットアヘメト and Akira Nishiyama and 杉井信之 and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Electrical characterization of atomically flat NiSi2 Schottky diode}, booktitle = {}, year = 2013, } @inproceedings{CTT100654596, author = {Jun Kanehara and Yusuke Takei and Youhei Miyata and Hiroshi Nohira and Y. Izumi and TAKAYUKI MURO and 木下豊彦 and パールハットアヘメト and Kuniyuki KAKUSHIMA and KAZUO TSUTSUI and takeo hattori and HIROSHI IWAI}, title = {Depth Profiling of As with Various Chemical Bonding States Doped in Si Shallow Junction by Using Soft X-ray Photoelectron Spectroscopy}, booktitle = {}, year = 2013, } @inproceedings{CTT100654598, author = {Kouhei Akita and Jun Kanehara and Hiroshi Nohira and Y. Izumi and TAKAYUKI MURO and 木下豊彦 and パールハットアヘメト and Kuniyuki KAKUSHIMA and KAZUO TSUTSUI and takeo hattori and HIROSHI IWAI}, title = {[517] Y. Miyata, K. Akita, J. Kanehara, H. Nohira, Y. Izumi, T. Muro, T. Kinoshita, P. Analysis of Boron Doped in Si Fin Structure by Soft X-ray Photoelectron Spectroscopy}, booktitle = {}, year = 2013, } @inproceedings{CTT100654663, author = {Tasuku Kaneda and Miyuki Kouda and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Influence of Flash Lamp Annealing on Electrical Characteristics of MOS Device with Si/ La2O3/n-Si Structure}, booktitle = {ECS Transactions}, year = 2013, } @inproceedings{CTT100654667, author = {中島一裕 and Soshi Sato and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Dependence of Interface-State Density on Three Dimensional Silicon Structure Measured by Charge-Pumping Method}, booktitle = {ECS Transactions}, year = 2013, } @inproceedings{CTT100654668, author = {中島一裕 and Soshi Sato and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Dependence of Interface-State Density on Three Dimensional Silicon Structure Measured by Charge-Pumping Method}, booktitle = {ECS Transactions}, year = 2013, } @inproceedings{CTT100654678, author = {Yuta Tamura and 吉原亮 and Kuniyuki KAKUSHIMA and 中塚理 and パールハットアヘメト and Hiroshi Nohira and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Electrical Properties of Ultrathin-Nickel-Silicide Schottky Diodes on Si(100)}, booktitle = {}, year = 2013, } @inproceedings{CTT100654679, author = {Takamasa Kawanago and Yeonghun Lee and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Characterization of Effective Electron Mobility in n/MOSFETs with Direct Contact La-silicate/Si Structure}, booktitle = {}, year = 2013, } @inproceedings{CTT100654680, author = {Yuya Suzuki and ダリューシュザデ and Ryuji Hosoi and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Electrical characteristics of La2O3/In0.53Ga0.47AAs capacitors with surface nitridation}, booktitle = {}, year = 2013, } @inproceedings{CTT100657453, author = {shinichi kano and 竇春萌 and unknown unknown and Kuniyuki KAKUSHIMA and パールハットアヘメト and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and 片岡好則 and Kenji Natori and Miranda Enrique and takeo hattori and HIROSHI IWAI}, title = {Influence electrode materials on CeOx based resistive switching}, booktitle = {}, year = 2013, } @inproceedings{CTT100658112, author = {Takamasa Kawanago and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Interface properties of La-silicate gate dielectrics on Si(110)surface}, booktitle = {}, year = 2013, } @inproceedings{CTT100658129, author = {unknown unknown and shinichi kano and 竇春萌 and Kuniyuki KAKUSHIMA and Ahmet Parhat and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Resistive Switching Device using Ce-oxide with Ni-silicide Electrodes}, booktitle = {}, year = 2013, } @inproceedings{CTT100658130, author = {unknown unknown and shinichi kano and 竇春萌 and Kuniyuki KAKUSHIMA and Ahmet Parhat and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Resistive Switching Device using Ce-oxide with Ni-silicide Electrodes}, booktitle = {}, year = 2013, } @inproceedings{CTT100658131, author = {unknown unknown and shinichi kano and 竇春萌 and Kuniyuki KAKUSHIMA and Ahmet Parhat and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Resistive Switching Device using Ce-oxide with Ni-silicide Electrodes}, booktitle = {}, year = 2013, } @inproceedings{CTT100658132, author = {unknown unknown and shinichi kano and 竇春萌 and Kuniyuki KAKUSHIMA and Ahmet Parhat and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Resistive Switching Device using Ce-oxide with Ni-silicide Electrodes}, booktitle = {}, year = 2013, } @inproceedings{CTT100658134, author = {K. Tuokedaerhan and Shuhei Hosoda and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Work Function Extraction of W,Ta and Ti Carbides Formed by Multi Stacked Process}, booktitle = {}, year = 2013, } @inproceedings{CTT100658307, author = {Wei Li and 中島一裕 and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Extraction of Interface State Density of 3-dimensional Si channel}, booktitle = {}, year = 2013, } @inproceedings{CTT100658327, author = {Jiangning Chen and 鹿 国強 and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and 西山彰 and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Electrical characteristics of AlGaN/GaN HEMT with La-oxide gate dielectrics}, booktitle = {}, year = 2013, } @inproceedings{CTT100658328, author = {Jiangning Chen and 鹿 国強 and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and 西山彰 and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Electrical characteristics of AlGaN/GaN HEMT with La-oxide gate dielectrics}, booktitle = {}, year = 2013, } @inproceedings{CTT100658329, author = {Jiangning Chen and 鹿 国強 and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and 西山彰 and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Electrical characteristics of AlGaN/GaN HEMT with La-oxide gate dielectrics}, booktitle = {}, year = 2013, } @inproceedings{CTT100658330, author = {shinichi kano and 竇春萌 and unknown unknown and Kuniyuki KAKUSHIMA and パールハットアヘメト and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Transient Switching Characteristics of Ce-oxide Resistive Switching Devices}, booktitle = {}, year = 2013, } @inproceedings{CTT100658331, author = {Yuya Suzuki and ダリューシュザデ and Hiroshi Oomine and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and 西山彰 and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Interface Engineering of La2O3/InGaAs Capacitors with High Temperature Stability}, booktitle = {}, year = 2013, } @inproceedings{CTT100658332, author = {田中祐樹 and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and KAZUO TSUTSUI and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Interface controlled metal contact for n-type diamonds}, booktitle = {}, year = 2013, } @inproceedings{CTT100658334, author = {Yuta Tamura and 吉原亮 and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Stacked Ni-Silicidation Process for Schottky Barrier FET}, booktitle = {}, year = 2013, } @inproceedings{CTT100658335, author = {Kana Tsuneishi and Jiangning Chen and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {A Robust Ohmic Contact Process for AlGaN/GaN using Ti-silicide electrodes}, booktitle = {}, year = 2013, } @inproceedings{CTT100658354, author = {Kazuki Matsumoto and 小山将央 and Y. Wu and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Size dependent resistivity change of Ni-silicides in nano-region}, booktitle = {}, year = 2013, } @inproceedings{CTT100658356, author = {Yang Zhao and マイマイティ マイマイティレャアティ and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Separation of bulk and interface traps of La-silicate on Si(100) surface}, booktitle = {}, year = 2013, } @inproceedings{CTT100658357, author = {Yang Zhao and マイマイティ マイマイティレャアティ and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Separation of bulk and interface traps of La-silicate on Si(100) surface}, booktitle = {}, year = 2013, } @inproceedings{CTT100658358, author = {Yang Zhao and マイマイティ マイマイティレャアティ and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Separation of bulk and interface traps of La-silicate on Si(100) surface}, booktitle = {}, year = 2013, } @inproceedings{CTT100658361, author = {Taichi Inamura and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Formation of Fe-silicides using Multi-Stacking Sputtering Process}, booktitle = {}, year = 2013, } @inproceedings{CTT100658362, author = {Taichi Inamura and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Formation of Fe-silicides using Multi-Stacking Sputtering Process}, booktitle = {}, year = 2013, } @inproceedings{CTT100658363, author = {Hiroshi Oomine and ダリューシュザデ and Yuya Suzuki and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {La-Oxide Gate Dielectrics for InGaAs Substrates formed by Chemical Vapor Deposition}, booktitle = {}, year = 2013, } @inproceedings{CTT100658364, author = {Hiroshi Oomine and ダリューシュザデ and Yuya Suzuki and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {La-Oxide Gate Dielectrics for InGaAs Substrates formed by Chemical Vapor Deposition}, booktitle = {}, year = 2013, } @inproceedings{CTT100658365, author = {関拓也 and Takamasa Kawanago and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Infrared absorption study of La-silicate gate dielectrics}, booktitle = {}, year = 2013, } @inproceedings{CTT100658366, author = {Atsushi Takemasa and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and KAZUO TSUTSUI and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Impact of Surface Treatments for Metal Contact on p-type Diamonds}, booktitle = {}, year = 2013, } @inproceedings{CTT100658389, author = {Shuhei Hosoda and K. Tuokedaerhan and Kuniyuki KAKUSHIMA and パールハットアヘメト and KAZUO TSUTSUI and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Improvenents in interface, states with W-carbide metal gate for La2O3/si MOS Capacitor}, booktitle = {}, year = 2013, } @inproceedings{CTT100658390, author = {吉原亮 and Yuta Tamura and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {A Novel Ohmic Contact Process for n-Ge Substrates}, booktitle = {}, year = 2013, } @inproceedings{CTT100658393, author = {宋 禛漢 and 小山将央 and Kazuki Matsumoto and Kuniyuki KAKUSHIMA and 中塚理 and 大毛利健治 and KAZUO TSUTSUI and Akira Nishiyama and Nobuyuki Sugii and Keisaku Yamada and HIROSHI IWAI}, title = {Atomically flat Ni-silicide/Si interface using NiSi2 sputtering}, booktitle = {}, year = 2013, } @inproceedings{CTT100658396, author = {Mari Okamoto and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Extraction of Energy Band Diagram of AlGaN/GaN with SiO2 Capped Annealing using X-ray Photoelectron Spectroscopy}, booktitle = {}, year = 2013, } @inproceedings{CTT100658546, author = {関拓也 and Takamasa Kawanago and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {International Symposium on Next-Generation Electronics(ISNE 2013)}, booktitle = {}, year = 2013, } @inproceedings{CTT100658611, author = {Kazuki Matsumoto and 小山将央 and Y. Wu and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Electrical Analyses of Nickel Silicide Formed on Si Nanowires with 10-nm-width}, booktitle = {}, year = 2013, } @inproceedings{CTT100658699, author = {Kuniyuki KAKUSHIMA and Hitoshi Wakabayashi and KAZUO TSUTSUI and HIROSHI IWAI}, title = {Interface State Density of Passivation/Nanowire Interface}, booktitle = {}, year = 2013, } @inproceedings{CTT100658700, author = {Kuniyuki KAKUSHIMA and 吉原亮 and KAZUO TSUTSUI and HIROSHI IWAI}, title = {A Low Temperature Ohmic Contact Process for n-type Ge Substrates}, booktitle = {}, year = 2013, } @inproceedings{CTT100659873, author = {Takamasa Kawanago and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and 西山彰 and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Interface properties of La-silicate gate dielectrics on Si(110)surface}, booktitle = {}, year = 2013, } @inproceedings{CTT100660879, author = {Takamasa Kawanago and Kuniyuki KAKUSHIMA and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Advantage of TiN Schottky Gate over Conventional Ni for Improved Electrical Characteristics in AlGaN/GaN HEMT}, booktitle = {}, year = 2013, } @inproceedings{CTT100660886, author = {ダリューシュザデ and Hiroshi Oomine and Kuniyuki KAKUSHIMA and 片岡好則 and 西山彰 and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {Scalable La-silicate Gate Dielectric on InGaAs Substrate with High Thermal Stability and Low Interface State Density}, booktitle = {}, year = 2013, } @inproceedings{CTT100660888, author = {unknown unknown and shinichi kano and 竇春萌 and Kuniyuki KAKUSHIMA and パールハットアヘメト and 片岡好則 and Akira Nishiyama and Nobuyuki Sugii and Hitoshi Wakabayashi and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {A Proposal of a Forming-Free Resistive Switching Memory based on Breakdown and Anodic Reoxidation of thin SiO2 on NiSi2 Electrode using CeOx Buffer Layer}, booktitle = {}, year = 2013, } @inproceedings{CTT100661649, author = {石川昂 and 小路智也 and 角嶋邦之 and 若林整 and 片岡好則 and 西山彰 and 杉井信之 and 筒井一生 and 名取研二 and 岩井洋}, title = {チャージポンピング法を用いた三次元Si構造の界面準位密度測定}, booktitle = {}, year = 2013, } @inproceedings{CTT100661653, author = {米澤宏昭 and 中島 昭 and 西澤 伸一 and 大橋 弘通 and 筒井一生 and 角嶋邦之 and 若林整 and 岩井洋}, title = {AlGaN/GaN系pチャンネルHFETの製作}, booktitle = {}, year = 2013, } @inproceedings{CTT100661655, author = {武井優典 and 神谷真行 and 寺山一真 and 米澤宏昭 and 齋藤 渉 and 筒井一生 and 角嶋邦之 and 若林整 and 片岡好則 and 岩井洋}, title = {AlGaN/GaN系HEMTにおけるコンタクト特性のAlGaN層厚依存性}, booktitle = {}, year = 2013, } @inproceedings{CTT100661657, author = {神谷真行 and 寺山一真 and 武井優典 and 齋藤 渉 and 角嶋邦之 and 若林整 and 片岡好則 and 筒井一生 and 岩井洋}, title = {AlGaN/GaN HEMTへの凹凸AlGaN層導入による2次元電子ガス濃度分布評価および低抵抗コンタクト形成の可能性}, booktitle = {}, year = 2013, } @inproceedings{CTT100661659, author = {大橋匠 and 若林整 and 角嶋邦之 and 杉井信之 and 西山彰 and 片岡好則 and 名取研二 and 筒井一生 and 岩井洋}, title = {単層MoS2チャネルを用いたn-MOSFETの性能見積もり}, booktitle = {}, year = 2013, } @inproceedings{CTT100661660, author = {松川佳弘 and 岡本真里 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋 and 齋藤渉}, title = {AlGaN/GaN上のTiC電極の電流電圧特性の熱処理温度依存性}, booktitle = {}, year = 2013, } @inproceedings{CTT100661663, author = {嘉藤貴史 and 稲村太一 and 佐々木 亮人 and 青木 克明 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {Fe層とSi層の積層スパッタにより形成されたβ-FeSi2のキャリア密度に関する研究}, booktitle = {}, year = 2013, } @inproceedings{CTT100661664, author = {劉 璞誠 and 米澤宏昭 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {AlGaNのドライエッチングへのBcl3の影響に関する研究}, booktitle = {}, year = 2013, } @inproceedings{CTT100661665, author = {譚錫昊 and 岡本真里 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {AlGaN/GaN上のTiSi2電極によるコンタクトの温度依存性}, booktitle = {}, year = 2013, } @inproceedings{CTT100661678, author = {元木雅章 and 吉原亮 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {Pを導入したNiSi2電極を用いたn-Ge基板の電流電圧特性の熱処理依存性}, booktitle = {}, year = 2013, } @inproceedings{CTT100661680, author = {宗清修 and 川那子高暢 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {ショットキーゲート材料によるAlGaN/GaNの容量電圧特性への影響}, booktitle = {}, year = 2013, } @inproceedings{CTT100661681, author = {長谷川明紀 and 呉研 and 宋 禛漢 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {低バンドギャップ、バンドオフセットを持つ半導体シリサイド/Si接合によるトンネルFET特性向上}, booktitle = {}, year = 2013, } @inproceedings{CTT100662336, author = {中村嘉基 and 細田修平 and Tuokedaerhan Kamale and 角嶋邦之 and 片岡好則 and 西山彰 and 若林整 and 杉井信之 and 筒井一生 and 名取研二 and 岩井洋}, title = {W2Cゲート電極とLa-silicateゲート絶縁膜を用いたMOSキャパシタの信頼性評価}, booktitle = {}, year = 2013, } @inproceedings{CTT100662337, author = {小路智也 and 石川昂 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {チャージポンピング法を用いた立体Si構造の絶縁膜界面準位の位置推定}, booktitle = {}, year = 2013, } @inproceedings{CTT100662338, author = {岡本真里 and 松川佳弘 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {TiSi2電極の熱処理によるAlGaN/GaNへのコンタクト特性の変化}, booktitle = {}, year = 2013, } @inproceedings{CTT100662339, author = {今村浩章 and 稲村太一 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {Krガスを用いた積層シリサイド化スパッタプロセスにより形成したNiSi2の薄膜評価}, booktitle = {}, year = 2013, } @inproceedings{CTT100662340, author = {鹿国強 and 大嶺洋 and ザデハサン ダリユーシユ and 角嶋邦之 and 西山彰 and 杉井信之 and 片岡好則 and 若林整 and 筒井一生 and 名取研二 and 岩井洋}, title = {ALD堆積条件によるLa2O3/In0.53Ga0.47Asキャパシタの電気特性への影響}, booktitle = {}, year = 2013, } @inproceedings{CTT100662341, author = {宋 禛漢 and 松本一輝 and 角嶋邦之 and 片岡好則 and 西山彰 and 杉井信之 and 若林整 and 筒井一生 and 名取研二 and 服部健雄 and 岩井洋}, title = {Niシリサイドナノワイヤ抵抗率のNi膜厚依存性}, booktitle = {}, year = 2013, } @inproceedings{CTT100831028, author = {DARYOUSH ZADEH and Hiroshi Oomine and Yuya Suzuki and Kuniyuki KAKUSHIMA and Hiroshi Nohira and Akira Nishiyama and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and HIROSHI IWAI}, title = {La2O3/Ino.53Ga.0.47As metal-oxide-semiconductor capacitor with low interface state density using TiN/W gate alectrode}, booktitle = {}, year = 2013, } @inproceedings{CTT100649144, author = {小山将央 and Naoto Shigemori and Kenji Ozawa and Kiichi Tachi and Kuniyuki KAKUSHIMA and O. Nakatsuka and 大毛利健治 and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and Keisaku Yamada and HIROSHI IWAI}, title = {Si/Ni-Silicide Schottky Junctions with Atomically Flat Interfaces Using NiSi2 Source}, booktitle = {}, year = 2013, } @inproceedings{CTT100652202, author = {Kuniyuki KAKUSHIMA and Jun Kanehara and takeo hattori and KAZUO TSUTSUI and HIROSHI IWAI}, title = {Boron depth profile of a plasma immersed substrate by XPS analysis}, booktitle = {}, year = 2013, } @inproceedings{CTT100654160, author = {Takamasa Kawanago and Kuniyuki KAKUSHIMA and パールハットアヘメト and 西山彰 and Nobuyuki Sugii and KAZUO TSUTSUI and KENJI NATORI and takeo hattori and HIROSHI IWAI}, title = {Nitrogen incorporated La-silicate gate dielectric with high scalability}, booktitle = {}, year = 2013, } @inproceedings{CTT100654161, author = {マイマイティ マイマイティレャアティ and 関拓也 and Kuniyuki KAKUSHIMA and Ahmet Parhat and 西山彰 and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Evaluation of oxide traps in La based oxides for direct high-k/Si capacitor}, booktitle = {}, year = 2013, } @inproceedings{CTT100654165, author = {unknown unknown and A. Ablimit and Kuniyuki KAKUSHIMA and パールハットアヘメト and 西山彰 and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Electron transport in ballistic diodes: influence of phonon generation in drain region}, booktitle = {}, year = 2013, } @inproceedings{CTT100654572, author = {DARYOUSH ZADEH and Yuya Suzuki and Kuniyuki KAKUSHIMA and パールハットアヘメト and 西山彰 and Nobuyuki Sugii and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Characterization of metal Schottky junction for InGaAs substrate}, booktitle = {}, year = 2013, } @inproceedings{CTT100654573, author = {竇春萌 and Soshi Sato and Kuniyuki KAKUSHIMA and パールハットアヘメト and Akira Nishiyama and 杉井信之 and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Si nanowire FET with asymmetric channel}, booktitle = {}, year = 2013, } @inproceedings{CTT100654574, author = {Y. Wu and Kuniyuki KAKUSHIMA and パールハットアヘメト and Akira Nishiyama and 杉井信之 and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {An analytical model of a tunnel FET with Schottky junction}, booktitle = {}, year = 2013, } @inproceedings{CTT100654576, author = {K.Tuokedaerhan and 金田翼 and Kuniyuki KAKUSHIMA and Ahmet Parhat and Akira Nishiyama and 杉井信之 and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Impact of annealing ambient for La2O3/Si capacitor}, booktitle = {}, year = 2013, } @inproceedings{CTT100654577, author = {来山大祐 and Kuniyuki KAKUSHIMA and パールハットアヘメト and Akira Nishiyama and 杉井信之 and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {[Effect of Silicate Formation at Metal Gate/High-k Interface on Electrical Characteristics of La2O3 gated MOS Devices}, booktitle = {}, year = 2013, } @inproceedings{CTT100654579, author = {中島一裕 and Wei Li and Kuniyuki KAKUSHIMA and パールハットアヘメト and Akira Nishiyama and 杉井信之 and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Interface state density measurements of 3D silicon channel by charge pumping method}, booktitle = {}, year = 2013, } @inproceedings{CTT100654580, author = {中島一裕 and Wei Li and Kuniyuki KAKUSHIMA and パールハットアヘメト and Akira Nishiyama and 杉井信之 and KAZUO TSUTSUI and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Interface state density measurements of 3D silicon channel by charge pumping method}, booktitle = {}, year = 2013, } @inproceedings{CTT100649139, author = {Takamasa Kawanago and Yeonghun Lee and Kuniyuki KAKUSHIMA and Ahmet Parhat and KAZUO TSUTSUI and 西山彰 and Nobuyuki Sugii and Kenji Natori and takeo hattori and HIROSHI IWAI}, title = {Metal Inserted Poly-Si wirh High Temperature Annealing for Achieving EOT of 0.62nm in La-silicate MOSFET}, booktitle = {}, year = 2013, } @misc{CTT100663668, author = {AHMETPARHAT and マイマイティ マイマイティレシャティ and 岩井洋 and 服部健雄 and 筒井一生 and 角嶋邦之}, title = {半導体素子}, howpublished = {公開特許}, year = 2013, month = {}, note = {特願2011-285538(2011/12/27), 特開2013-135135(2013/07/08)} }