@article{CTT100923313, author = {Kazuya Fujita and Kosuke Suzuki and Keisuke Asano and Chun-Yi Chen and Tomoyuki Kurioka and Katsuyuki. Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone and Tso-Fu Mark Chang}, title = {Simultaneous Necking and Barreling Deformation Behaviors in Bending of Single Crystal Gold Micro-Cantilever}, journal = {Materials}, year = 2024, } @article{CTT100911989, author = {Ryohei Hori and Kazuya Fujita and Chun Yi Chen and Tomoyuki Kurioka and Tso-Fu Mark Chang and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Cross-Sectional Geometry Effect on Bending Strength of Gold Micro-Cantilever with Trapezoidal Cross-Section}, journal = {Micro and Nano Engineering}, year = 2024, } @article{CTT100911525, author = {Syota Kanno and Taro Omura and Tomoyuki Kurioka and Chun-Yi Chen and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone and Tso-Fu Mark Chang}, title = {Effect of Strain Rate in Compression Electrodeposited Gold Micro-Pillar toward Design of MEMS Component}, journal = {Micro and Nano Engineering}, year = 2024, } @article{CTT100909951, author = {Ryosuke Miyai and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Akira Onishi and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Clarification of Geometric Effects on Long-Term Structural Stability of Ti/Au Multi- Layered Micro-Cantilevers}, journal = {Micro and Nano Engineering}, year = 2024, } @article{CTT100910937, author = {Syunkai Watanabe and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Akira Onishi and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Dependence of Structural Design on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers  }, journal = {Micro and Nano Engineering}, year = 2024, } @article{CTT100909052, author = {Taro Omura and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Akira Onishi and Parthojit Chakraborty and Katsuyuki Machida and Hiroyuki ; Ito and Yoshihiro Miyake and Masato Sone}, title = {Warpage Study of the Electrodeposited-Au Micro-Components Having the Ti/Au Multi-layered Structures toward MEMS Applications}, journal = {Journal of The Electrochemical Society}, year = 2024, } @article{CTT100908961, author = {Kisuke Miyado and Devi Srujana Tenneti and Akira Onishi and Katsuyuki Machida and Tomoyuki Kurioka and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito}, title = {Serpentine Spring Design Technique for High Sensitivity MEMS Capacitive Accelerometer Fabricated by Gold Multi-layer Metal Technology}, journal = {Japanese Journal of Applied Physics}, year = 2024, } @inproceedings{CTT100922773, author = {Tomoyuki Kurioka and Takumi Akiyama and Chun-Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Thermal Treatment Effects on Warpage of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-layered Structure Toward High-sensitive Accelerometers}, booktitle = {CPIT2024, New Method of Damage and Failure Analysis of Structural Part}, year = 2024, } @inproceedings{CTT100923314, author = {Masato Sone and Ryohei Hori and Kazuya Fujita and Kosuke Suzuki and Ken Hashigata and Keisuke Asano and Tomoyuki Kurioka and Tso-Fu Mark Chang and Chun-Yi Chen and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake}, title = {Effects of Sample Geometry and Grain Size on Mechanical Property of Electrodeposited Dold and Gold-Copper Alloys by Micro-\bending Test Toward MEMS Applications}, booktitle = {CPIT2024, New Method of Damage and Failure Analysis of Structural Part}, year = 2024, } @inproceedings{CTT100922775, author = {Shunkai Watanabe and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Tenneti Devi Srujana and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Investigation of Effects of Applied Voltage on Effective Young’s modulus of Ti/Au Multi-Layered Micro-Cantilevers” New Method of Damage and Failure Analysis of Structural Part}, booktitle = {New Method of Damage and Failure Analysis of Structural Part}, year = 2024, } @inproceedings{CTT100922774, author = {Tatsuhiko Mori and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Evaluation of Warpage Behavior of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-Layered Structures caused by Thermal Treatment}, booktitle = {CPIT2024, New Method of Damage and Failure Analysis of Structural Part}, year = 2024, } @inproceedings{CTT100917498, author = {Syunkai Watanabe and Shunkai Watanabe and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Tenneti Devi Srujana and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Dependence of Applied Voltage on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers for MEMS Capacitive Accelerometers}, booktitle = {50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)}, year = 2024, } @inproceedings{CTT100917496, author = {Tatsuhiko Mori and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Thermal Treatment Effects on Warpage of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-layered Structure Toward High-sensitive Accelerometers}, booktitle = {50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)}, year = 2024, } @inproceedings{CTT100917499, author = {Ryosuke Miyai and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Evaluation of the Effect of Heat Treatment on the Structural Stability of Au Micro-Cantilevers with Ti/Au Multi-layered Structures}, booktitle = {50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)}, year = 2024, } @inproceedings{CTT100917501, author = {Syota Kanno and Taro Omura and Tomoyuki Kurioka and Chun-Yi Chen and Tso-Fu Mark Chang and Katsuyuki Machida and Hiroyuki Ito and Yoshihiro Miyake and Masato Sone}, title = {Strain Rate Sensitivity in Gold Micro-Pillars: Designing MEMS Components with Grain Boundary and Sample Size Effects}, booktitle = {50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)}, year = 2024, } @inproceedings{CTT100917601, author = {Kisuke Miyado and Torauto Yamada and Devi Srujana Tenneti and Chihaya Mukaide and Katsuyuki Machida and Tomoyuki Kurioka and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito}, title = {Effect of Perforated Proof-Mass Hole Size on Device Characteristics of Gold Single-Axis MEMS Accelerometer for Micro-g Level Sensing}, booktitle = {50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)}, year = 2024, } @inproceedings{CTT100917604, author = {Devi Srujana Tenneti and Kisuke Miyado and Chihaya Mukaide and Torauto Yamada and Katsuyuki Machida and Tomoyuki Kurioka and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki Ito}, title = {Suppression of Warpage in Perforated Proof-Mass of Gold Single-Axis MEMS Accelerometers for Micro-g Level Sensing}, booktitle = {50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)}, year = 2024, } @inproceedings{CTT100908972, author = {森 達彦 and 栗岡 智行 and Chen Chun-Yi and Chang Tso-Fu Mark and 町田 克之 and 伊藤 浩之 and 三宅 美博 and 曽根 正人}, title = {Ti/Au 積層電気金めっき錘の反り変形の熱処理温度依存性評価}, booktitle = {Proc. The 71st JSAP Spring MeetinProc.}, year = 2024, } @inproceedings{CTT100908971, author = {宮井 良介 and 栗岡 智行 and Chun-Yi Chen and Tso-Fu Mark Chang and 町田 克之 and 伊藤 浩之 and 三宅 美博 and 曽根 正人}, title = {Ti/Au 積層構造有するマイクロカンチレバーの 構造安定性に対する熱処理の影響評価}, booktitle = {Proc. The 71st JSAP Spring MeetinProc.}, year = 2024, } @inproceedings{CTT100908973, author = {菅野 翔太 and 大村 太郎 and 栗岡 智行 and Chun-Yi Chen and 町田 克之 and 伊藤 浩之 and 三宅 美博 and Tso-Fu Mark Chang and 曽根 正人}, title = {MEMS加速度センサへの応用に向けためっき金の微小圧縮試験によるひずみ速度依存性調査}, booktitle = {Proc. The 71st JSAP Spring MeetinProc.}, year = 2024, }