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伊藤浩之 2018年 研究業績一覧 (49件 / 554件)
論文
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Motohiro Takayasu,
Ippei Tsuji,
Hiroyuki Ito,
Daisuke Yamane,
Shiro Dosho,
Toshifumi Konishi,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
Microgravity Generation Using Tilting Board for Resolution Evaluation of MEMS Accelerometer,
Sensors and Materials,
Vol. 30,
No. 12,
pp. 2919-2926,
Dec. 2018.
-
Motoaki Hara,
Yuichiro Yano,
Masatoshi Kajita,
Hitoshi Nishino,
Yasuhiro Ibata,
Shinsuke Hara,
Masaya Toda,
Akifumi Kasamatsu,
Hiroyuki Ito,
Takahito Ono,
Tetsuya Ido.
Microwave oscillator using piezoelectric thin-film resonator aiming for ultraminiaturization of atomic clock,
Review of Scientific Instruments,
89,
10,
105002,
Oct. 2018.
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Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Shin-ichi Iida,
Takuma Suzuki,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Hiroyuki Ito,
Shiro Dosho,
Noboru Ishihara,
Masato Sone,
Katsuyuki Machida,
Kazuya Masu.
Temperature Characteristics of MEMS Inertial Sensor Fabricated by Gold Multi-Layer Metal Technology,
13th Annual IEEE International Conference on Nano-Micro Engineered and Molecular Systems (IEEE NEMS 2018),
pp. WM-II-f3243,
Apr. 2018.
公式リンク
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Motohiro Takayasu,
Shiro Dosho,
Hiroyuki Ito,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Noboru Ishihara,
Kazuya Masu.
A 0.18-?m CMOS time-domain capacitive-sensor interface for sub-1mG MEMS accelerometers,
IEICE Electronics Express,
Vol. 15,
no. 2,
p. 20171227,
Jan. 2018.
国際会議発表 (査読有り)
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Shota Otobe,
Tatsuya Koga,
Ken Atsumi,
Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Shin-ichi Iida,
Hiroyuki. Ito,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
A Sub-1mG Tri-Axis MEMS Accelerometer with Multiple Segmented Capacitance Detection Electrodes,
31st International Microprocesses and Nanotechnology Conference (MNC2018),
Nov. 2018.
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Ken Hashigata,
Hao-chun Tang,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone..
Electrodeposition of Gold on Titanium and Bending Test of Au-Ti Bi-Layered Micro-Cantilever,
IUMRS-ICA 2018,
IUMRS-ICA 2018,
Oct. 2018.
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Takahiro Yamamoto,
Hao-chun Tang,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
Mechanical Property and Thermal Stability of Electrodeposited Au-Cu Alloys for Reliability of MEMS Devices,
44rd International Conference on Micro & Nano Engineering (MNE2018),
44rd International Conference on Micro & Nano Engineering (MNE2018),
Sept. 2018.
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Koichiro Tachibana,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Kyotaro Nitta,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
Reliability Characteristics of Ti/Au Micro-Cantilever by Long-Term Vibration Test,
44rd International Conference on Micro & Nano Engineering (MNE2018),
44rd International Conference on Micro & Nano Engineering (MNE2018),
Sept. 2018.
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Kyotaro Nitta,
Koichiro Tachibana,
Hao-Chun Tang,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
Cu-Alloying Effect on Structure Stability of Au Micro-Cantilever,
44rd International Conference on Micro & Nano Engineering (MNE2018),
44rd International Conference on Micro & Nano Engineering (MNE2018),
Sept. 2018.
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Keisuke Asano,
Hao-chun Tang,
Chun-Yi Chen,
Takashi Nagoshi,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
Electrodeposited Au-Cu Alloy with High Yield Stress Evaluated by Micro-Bending Test,
44rd International Conference on Micro & Nano Engineering (MNE2018),
44rd International Conference on Micro & Nano Engineering (MNE2018),
Sept. 2018.
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Ken Hashigata,
Hao-chun Tang,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
Mechanical Strength Enhancement of Ti/Au Layered Structure Evaluated by Micro-Bending Test,
44rd International Conference on Micro & Nano Engineering (MNE2018),
44rd International Conference on Micro & Nano Engineering (MNE2018),
Sept. 2018.
-
Hideaki Nakajima,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
Young’s Modulus of Ti/Au Micro-Cantilever by Resonance Frequency Method toward Au-Based MEMS Device,
44rd International Conference on Micro & Nano Engineering (MNE2018),
44rd International Conference on Micro & Nano Engineering (MNE2018),
Sept. 2018.
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Hao-chun Tang,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Takashi Nagoshib,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
High Strength Electrodeposited Gold-Copper Alloys for MEMS Devices,
44rd International Conference on Micro & Nano Engineering (MNE2018),
44rd International Conference on Micro & Nano Engineering (MNE2018),
Sept. 2018.
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Hitomi Watanabe,
Takuma Suzuki,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
Effects of Ti/Au Layered Structure on Temperature Dependence of Micro-Cantilever Structure Stability,
44rd International Conference on Micro & Nano Engineering (MNE2018),
44rd International Conference on Micro & Nano Engineering (MNE2018),
Sept. 2018.
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Masato Sone,
Hideaki Nakajima,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroshi Toshiyoshi,
Hiroyuki Ito,
Kazuya Masu.
EFFECTIVE YOUNG’S MODULUS EVALUATION OF TI/AU MICRO STRUCTURES FOR MEMS ACCELEROMETER,
8th research workshop "NEW METHODS OF DAMAGE AND FAILURE ANALYSIS OF STRUCTURAL PARTS",
8th research workshop "NEW METHODS OF DAMAGE AND FAILURE ANALYSIS OF STRUCTURAL PARTS",
Sept. 2018.
-
Chun-Yi Chen,
Hao-Chun Tang,
Tso-Fu Mark Chang,
Takashi Nagoshi,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
Ultra-high Strength in Electroplated Nanocrystalline Au-Cu Alloys Evaluated by Micro-Compression Tests for MEMS Devices,
The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan,
Nano Engineering and Microsystem Technology Conference, Taiwan,
June 2018.
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Koichiro Tachibana,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Kyoutarou Nitta,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
Structure stability of Ti/Au micro-cantolever evaluated by long-term vibration test,
The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan,
Nano Engineering and Microsystem Technology Conference, Taiwan,
June 2018.
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HIdeaki Nakajima,
Tso-Fu Mark Chang,
Chun-Yi Chen,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
HIroshi Toshiyoshi,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
A Study on Effective Young’s Modulus of Micro-Cantilevers Fabricated by Au Electroplating,
The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan,
Nano Engineering and Microsystem Technology Conference, Taiwan,
June 2018.
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Masato Sone,
Hao-Chun Tang,
Chun-yi Chen,
Tso-Fu Mark Chang,
Takashi Nagoshi,
Daisuke Yamane,
Toshifumi Konishi,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu.
Characteristics of Electroplated Gold Material with Multilayer Metal Technology for CMOS-MEMS Accelerometer,
The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan,
Nano Engineering and Microsystem Technology Conference, Taiwan,
June 2018.
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Shota Otobe,
Daisuke Yamane,
Toshifumi Konishi,
Teruaki Safu,
Hiroyuki Ito,
Shiro Dosho,
Noboru Ishihara,
Katsuyuki Machida,
Kazuya Masu.
Tri-Axis Fully-Differential MEMS Accelerometer with Segmented Capacitance Detection,
Asia-Pacific Conference of Transducers and Micro-Nano Technology 2018 (APCOT 2018),
June 2018.
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Kyotaro Nitta,
Koichiro Tachibana,
Hao-Chun Tang,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Katsuyuki Machida,
Hiroyuki Ito,
Kazuya Masu,
Masato Sone.
Reliability Evaluation of Au-Cu Microcantilever by Long-Term Vibration Test toward MEMS Components,
The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference, Taiwan,
Nano Engineering and Microsystem Technology Conference, Taiwan,
June 2018.
-
Motoaki Hara,
Yuichiro Yano,
Masatoshi Kajita,
Shinsuke Hara,
Akifumi Kasamatsu,
Hiroyuki Ito,
Takahito Ono,
Tetsuya Ido.
FBAR-based 3.4 GHz Oscillator without Frequency Multiplications Aiming for an Integrated Atomic Clock Chip,
European Frequency and Time Forum,
Apr. 2018.
-
Motoaki Hara,
Yuichiro Yano,
Masatoshi Kajita,
Hitoshi Nishino,
Yasuhiro Ibata,
Masaya Toda,
Shinsuke Hara,
Akifumi Kasamatsu,
Hiroyuki Ito,
Takahito Ono,
Tetsuya Ido.
Micro Atomic Frequency Standards Employing an Integrated FBAR-VCO Oscillating on the 87Rb Clock Frequency without a Phase-Locked Loop,
The 31st IEEE International Conference on Micro Electro Mechanical Systems(MEMS 2018),
Jan. 2018.
公式リンク
国内会議発表 (査読有り)
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乙部 翔太,
山根 大輔,
小西 敏文,
佐布 晃昭,
飯田 慎一,
伊藤 浩之,
石原 昇,
町田 克之,
益 一哉.
シングルAu錘と分割電極容量検出(SCD)方式を用いた3軸全差動MEMS加速度センサ,
第10回集積化MEMSシンポジウム,
Oct. 2018.
公式リンク
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古賀 達也,
山根 大輔,
小西 敏文,
佐布 晃昭,
飯田 慎一,
伊藤 浩之,
石原 昇,
町田 克之,
益 一哉.
1軸MEMS加速度センサのAu錘厚膜化による高性能化の検討,
第35回「センサ・マイクロマシンと応用システム」シンポジウム(センサ・マイクロマシン部門大会),
Oct. 2018.
公式リンク
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市川 崇志,
新島 宏文,
古賀 達也,
山根 大輔,
小西 敏文,
佐布 晃昭,
飯田 慎一,
伊藤 浩之,
石原 昇,
町田 克之,
益 一哉.
Au単一錘平行平板型3軸MEMS加速度センサの検討,
第35回「センサ・マイクロマシンと応用システム」シンポジウム(センサ・マイクロマシン部門大会),
Oct. 2018.
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Haochun Tang,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Toshifumi Konishi,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Solid Solution Strengthening of Gold Based Materials for MEMS Applications,
The 35th SENSOR SYMPOSIUM on Sensors, Micromachines and Applied Systems,
Oct. 2018.
-
原基揚,
矢野雄一郎,
梶田雅稔,
西野仁,
戸田雅也,
原紳介,
笠松章史,
伊藤浩之,
小野崇人,
井戸哲也.
圧電薄膜共振子を利用した3.5 GHz帯CMOS発振回路の開発 と原子時計システムへの適用,
「センサ・マイクロマシンと応用システム」シンポジウム,
Oct. 2018.
-
伊藤 浩之,
?根 ?輔,
小西敏文,
道正 志郎,
?原 昇,
町? 克之,
曽根 正?,
三宅 美博,
益 ?哉.
集積化CMOS-MEMS技術による?感度慣性センサと応?システム,
応用物理学会第65回春季講演会,
応用物理学会第65回春季講演会,
Mar. 2018.
国際会議発表 (査読なし・不明)
-
Daisuke Yamane,
Katsuyuki Machida,
Hiroyuki Ito,
Kazuya Masu.
Sub-1mG MEMS Inertial Sensor for Biomedical Applications,
The 20th Takayanagi Kenjiro Memorial Symposium joined with the 4th International Conference on Nano Electronics Research and Education(ICNERE2018),
Nov. 2018.
-
Hiroyuki Ito.
Ultra-Low Power RF Circuit Technologies for IoT,
4th World Research Hub Initiative Workshop on Asian Industry Highway,
Nov. 2018.
-
Daisuke Yamane,
Katsuyuki Machida,
Hiroyuki Ito,
Kazuya Masu.
High-Resolution MEMS Accelerometer by Multi-Layer Metal Technology,
Taiwan-Japan-US Joint Workshop on Energy Materials and Sustainable Development,
Sept. 2018.
-
Kazuya Masu,
Daisuke Yamane,
Hiroyuki Ito,
Katsuyuki Machida,
Tso-Fu Mark Chang,
Masato Sone,
Yoshihiro Miyake.
CMOS-MEMS accelerometer with gold proof-mass and its application in diagnosis of Parkinsons Disease,
4th International Conference on Condensed Matter and Materials Physics,
Aug. 2018.
国内会議発表 (査読なし・不明)
-
原基揚,
矢野雄一郎,
梶田雅稔,
原紳介,
笠松章史,
伊藤浩之,
井戸哲也.
Rb時計周波数の直接発振を目的としたFBAR-VCOの開発,
超音波エレクトロニクスの基礎と応用に関するシンポジウム,
Oct. 2018.
-
伊藤浩之,
鹿島 光司,
深水 克郎,
永野風矢,
大場隆之.
密閉型稲水耕栽培装置の試作と評価,
農業環境工学関連学会2018年合同大会,
Sept. 2018.
-
伊藤浩之,
山根大輔,
小西敏文,
道正志郎,
石原昇,
町田克之,
曽根正人,
三宅美博,
益一哉.
MEMS加速度センサと生体計測への応用,
新化学技術推進協会 電子情報技術部会 マイクロナノシステムと材料・加工分科会 講演会,
May 2018.
-
宮内 楓,
田口 泰地,
石川 洋介,
伊藤 浩之,
道正 志郎,
益 一哉,
石原 昇.
RFバックスキャッタリングによる低電力ワイヤレスセンサ端末モジュールの試作評価結果,
2018年 電子情報通信学会総合大会,
Mar. 2018.
公式リンク
-
ヨ ジヨン,
伊藤浩之,
石原 昇,
道正志郎,
益 一哉.
音波・電波ハイブリッドによる測距技術の基礎検討,
集積回路研究会,
信学技報,
Vol. 117,
no. 462,
p. 57,
Mar. 2018.
公式リンク
-
古賀 達也,
高安 基大,
山根 大輔,
伊藤 浩之,
小西 敏文,
道正 志郎,
石原 昇,
町田 克之,
益 一哉.
積層メタル技術で作製したMEMS慣性センサのモジュール化の検討(2),
第64回応用物理学会春季学術講演会,
Mar. 2018.
-
新島 宏文,
乙部 翔太,
高安 基大,
山根 大輔,
小西 敏文,
佐布 晃昭,
伊藤 浩之,
年吉 洋,
町田 克之,
益 一哉.
高感度MEMS加速度センサのBrownian Noise評価に関する検討,
第64回応用物理学会春季学術講演会,
Mar. 2018.
-
小西 敏文,
山根 大輔,
佐布 晃昭,
陳 君怡,
Chang Tso-Fu Mark,
伊藤 浩之,
道正 志郎,
石原 昇,
曽根 正人,
町田 克之,
益 一哉,
飯田 慎一.
積層メタル技術を用いたMEMS慣性センサの封止環境における温度依存性,
第64回応用物理学会春季学術講演会,
Mar. 2018.
-
伊藤 浩之,
山根 大輔,
小西 敏文,
道正 志郎,
石原 昇,
町田 克之,
曽根 正人,
三宅 美博,
益 一哉.
集積化CMOS-MEMS技術による高感度慣性センサと応用システム,
第64回応用物理学会春季学術講演会,
Mar. 2018.
-
新島 宏文,
乙部 翔太,
高安 基大,
山根 大輔,
伊藤 浩之,
佐布 晃昭,
小西 敏文,
道正 志郎,
飯田 慎一,
石原 昇,
町田 克之,
益 一哉.
単一Au錘3軸差動MEMS加速度センサの検討,
平成30年電気学会全国大会,
Mar. 2018.
-
高安 基大,
古賀 達也,
辻 一平,
伊藤 浩之,
山根 大輔,
道正 志郎,
小西 敏文,
飯田 慎一,
石原 昇,
町田 克之,
益 一哉.
傾斜を用いた1mG MEMS加速度センサの分解能評価の検討,
平成30年 電気学会 全国大会,
Mar. 2018.
-
伊藤浩之.
アグリエレクトロニクスの研究 ―植物のキモチセンシングを目指して―,
人工知能・IoT・ビッグデータ分野における産学連携マッチングフェア,
Feb. 2018.
特許など
-
曽根正人,
Tso-Fu Mark Chang,
陳君怡,
町田克之,
山根大輔,
伊藤浩之,
益一哉.
貴金属またはその合金の微細結晶組織を有する金属材料.
特許.
公開.
国立大学法人東京工業大学.
2018/12/21.
特願2018-239826.
2020/07/02.
特開2020-100874.
2020.
-
伊藤浩之,
道正志郎,
石原昇,
益一哉.
静電容量検出回路.
特許.
登録.
国立大学法人東京工業大学.
2018/08/03.
特願2018-147146.
2020/02/06.
特開2020-020769.
特許第7161178号.
2022/10/18
2022.
-
益一哉,
町田克之,
山根大輔,
伊藤浩之,
佐布 晃昭 ,
小西 敏文 ,
飯田 慎一 .
微細素子.
特許.
登録.
国立大学法人東京工業大学, エヌ・ティ・ティ・アドバンステクノロジ株式会社.
2018/05/29.
特願2018-102096.
2019/12/05.
特開2019-207133.
特許第7002732号.
2022/01/05
2022.
-
石原昇,
伊藤浩之,
道正志郎,
益一哉.
無線センサおよびセンサネットワークシステム.
特許.
公開.
国立大学法人東京工業大学.
2018/02/28.
特願2018-034546.
2019/09/05.
特開2019-149090.
2019.
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