@article{CTT100624081, author = {Toshifumi Yuji and Narong Mungkung and Yuichi Kiyota and Daishiro Uesugi and Minobu Kawano and Kenichi Nakabayashi and Hisaaki Kataoka and Yoshifumi Suzaki and Nobuki Kashihara and Hiroshi Akatsuka}, title = {Surface Modification of Si Wafer by Low-Pressure High-Frequency Plasma Chemical Vapor Deposition Method}, journal = {IEEE Trans. Plasma Sci.}, year = 2011, } @inproceedings{CTT100634408, author = {T. Yuji and Y. Kiyota and Y. Okamura and H. Kinoshita and N. Mungkung and Y. Suzaki and T. Hamada and H. Akatsuka}, title = {Cleaning Process for Semiconductor Equipment Process on Atmospheric-Pressure Non-Equilibrium DC Pulse Plasma Jet}, booktitle = {Proc. the Japan – Thailand – Lao P.D.R. Joint Friendship International Conference on Applied Electrical and Mechanical Engineering 2011}, year = 2011, } @inproceedings{CTT100634409, author = {T. Yuji and N. Mungkung and A. Kobayashi and Y. Suzaki and H. Akatsuka}, title = {Diagnostics of Vibration and Rotational Temperatures in Atmospheric-Pressure Non-Equilibrium Discharge Electrodeless-Type Microwave Plasma Jet}, booktitle = {Proc. the Japan – Thailand – Lao P.D.R. Joint Friendship International Conference on Applied Electrical and Mechanical Engineering 2011}, year = 2011, } @inproceedings{CTT100626412, author = {湯地敏史 and 赤塚洋 and 須崎嘉文 and 芝田浩 and 田代真一 and 田中学}, title = {オイラー法による大気圧非平衡DCパルスプラズマ中のラジカルシミュレーション}, booktitle = {電気学会研究会資料}, year = 2011, } @inproceedings{CTT100619453, author = {湯地敏史 and 清田佑一 and 川野美延 and 中林健一 and 田代真一 and 田中学 and 赤塚洋}, title = {高周波低圧プラズマCVDにおける発光分光計測}, booktitle = {平成23年電気学会全国大会講演論文集}, year = 2011, }