@article{CTT100454096, author = {Kensuke Akiyama and Seishiro Oya and Hiromichi Takano and Nobuo Kieda and Hiroshi Funakubo}, title = {Growth of β-FeSi2 Thin Film on Si(111) by Metal Organic Chemical Vapor Deposition}, journal = {Jpn.J.Appl.Phys}, year = 2001, }