@article{CTT100792864,
  author = {Kensuke Akiyama and Seishiro Ohya and Hiroshi Funakubo},
  title = {β-FeSi2 Thin Film Preparation by ECR Plasma-Enhanced MOCVD},
  journal = {Trans. Mater. Res. Soc. Jpn.},
  year = 2003,
}