@article{CTT100785326, author = {Motohiro Takayasu and Ippei Tsuji and Hiroyuki Ito and Daisuke Yamane and Shiro Dosho and Toshifumi Konishi and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {Microgravity Generation Using Tilting Board for Resolution Evaluation of MEMS Accelerometer}, journal = {Sensors and Materials}, year = 2018, } @article{CTT100766253, author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Shin-ichi Iida and Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu}, title = {Temperature Characteristics of MEMS Inertial Sensor Fabricated by Gold Multi-Layer Metal Technology}, journal = {}, year = 2018, } @article{CTT100759250, author = {Motohiro Takayasu and Shiro Dosho and Hiroyuki Ito and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu}, title = {A 0.18-?m CMOS time-domain capacitive-sensor interface for sub-1mG MEMS accelerometers}, journal = {IEICE Electronics Express}, year = 2018, } @inproceedings{CTT100781337, author = {Yukiya TOHYAMA and Hiroaki HONMA and Noboru Ishihara and Hidehiko SEKIYA and Hiroshi Toshiyoshi and Daisuke Yamane}, title = {A Voltage-Boost Rectifier Circuit for Energy Harvesting from Environmental Vibrations}, booktitle = {}, year = 2018, } @inproceedings{CTT100777398, author = {Shota Otobe and Tatsuya Koga and Ken Atsumi and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Shin-ichi Iida and Hiroyuki. Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {A Sub-1mG Tri-Axis MEMS Accelerometer with Multiple Segmented Capacitance Detection Electrodes}, booktitle = {}, year = 2018, } @inproceedings{CTT100775377, author = {古賀 達也 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉}, title = {1軸MEMS加速度センサのAu錘厚膜化による高性能化の検討}, booktitle = {}, year = 2018, } @inproceedings{CTT100775380, author = {乙部 翔太 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉}, title = {シングルAu錘と分割電極容量検出(SCD)方式を用いた3軸全差動MEMS加速度センサ}, booktitle = {}, year = 2018, } @inproceedings{CTT100775374, author = {市川 崇志 and 新島 宏文 and 古賀 達也 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉}, title = {Au単一錘平行平板型3軸MEMS加速度センサの検討}, booktitle = {}, year = 2018, } @inproceedings{CTT100769399, author = {Shota Otobe and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {Tri-Axis Fully-Differential MEMS Accelerometer with Segmented Capacitance Detection}, booktitle = {}, year = 2018, } @inproceedings{CTT100772038, author = {伊藤浩之 and 山根大輔 and 小西敏文 and 道正志郎 and 石原昇 and 町田克之 and 曽根正人 and 三宅美博 and 益一哉}, title = {MEMS加速度センサと生体計測への応用}, booktitle = {}, year = 2018, } @inproceedings{CTT100760620, author = {伊藤 浩之 and ?根 ?輔 and 小西敏文 and 道正 志郎 and ?原 昇 and 町? 克之 and 曽根 正? and 三宅 美博 and 益 ?哉}, title = {集積化CMOS-MEMS技術による?感度慣性センサと応?システム}, booktitle = {応用物理学会第65回春季講演会}, year = 2018, } @inproceedings{CTT100760793, author = {Motohiro Takayasu and Shiro Dosho and Hiroyuki Ito and Noboru Ishihara and Kazuya Masu}, title = {A high-resolution capacitive-sensor interface based on a relaxation oscillator}, booktitle = {}, year = 2018, } @inproceedings{CTT100760932, author = {宮内 楓 and 田口 泰地 and 石川 洋介 and 伊藤 浩之 and 道正 志郎 and 益 一哉 and 石原 昇}, title = {RFバックスキャッタリングによる低電力ワイヤレスセンサ端末モジュールの試作評価結果}, booktitle = {}, year = 2018, } @inproceedings{CTT100760840, author = {ヨ ジヨン and 伊藤浩之 and 石原 昇 and 道正志郎 and 益 一哉}, title = {音波・電波ハイブリッドによる測距技術の基礎検討}, booktitle = {信学技報}, year = 2018, } @inproceedings{CTT100760808, author = {古賀 達也 and 高安 基大 and 山根 大輔 and 伊藤 浩之 and 小西 敏文 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉}, title = {積層メタル技術で作製したMEMS慣性センサのモジュール化の検討(2)}, booktitle = {}, year = 2018, } @inproceedings{CTT100760803, author = {小西 敏文 and 山根 大輔 and 佐布 晃昭 and 陳 君怡 and Chang Tso-Fu Mark and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉 and 飯田 慎一}, title = {積層メタル技術を用いたMEMS慣性センサの封止環境における温度依存性}, booktitle = {}, year = 2018, } @inproceedings{CTT100760802, author = {伊藤 浩之 and 山根 大輔 and 小西 敏文 and 道正 志郎 and 石原 昇 and 町田 克之 and 曽根 正人 and 三宅 美博 and 益 一哉}, title = {集積化CMOS-MEMS技術による高感度慣性センサと応用システム}, booktitle = {}, year = 2018, } @inproceedings{CTT100760801, author = {新島 宏文 and 乙部 翔太 and 高安 基大 and 山根 大輔 and 伊藤 浩之 and 佐布 晃昭 and 小西 敏文 and 道正 志郎 and 飯田 慎一 and 石原 昇 and 町田 克之 and 益 一哉}, title = {単一Au錘3軸差動MEMS加速度センサの検討}, booktitle = {}, year = 2018, } @inproceedings{CTT100760797, author = {高安 基大 and 古賀 達也 and 辻 一平 and 伊藤 浩之 and 山根 大輔 and 道正 志郎 and 小西 敏文 and 飯田 慎一 and 石原 昇 and 町田 克之 and 益 一哉}, title = {傾斜を用いた1mG MEMS加速度センサの分解能評価の検討}, booktitle = {}, year = 2018, } @misc{CTT100826097, author = {伊藤浩之 and 道正志郎 and 石原昇 and 益一哉}, title = {静電容量検出回路}, howpublished = {登録特許}, year = 2022, month = {}, note = {特願2018-147146(2018/08/03), 特開2020-020769(2020/02/06), 特許第7161178号(2022/10/18)} } @misc{CTT100826083, author = {山根大輔 and 石原昇 and 本間 浩章  and 年吉 洋 }, title = {振動発電装置}, howpublished = {公開特許}, year = 2020, month = {}, note = {特願2018-130894(2018/07/10), 特開2020-010541(2020/01/16)} } @misc{CTT100814171, author = {石原昇 and 伊藤浩之 and 道正志郎 and 益一哉}, title = {無線センサおよびセンサネットワークシステム}, howpublished = {公開特許}, year = 2019, month = {}, note = {特願2018-034546(2018/02/28), 特開2019-149090(2019/09/05)} }