@article{CTT100807192, author = {Tatsuya Koga and Takashi Ichikawa and Naoto Tanaka and Taiki Ogata and Hiroki Ora and Daisuke Yamane and Noboru Ishihara and Hiroyuki Ito and Masato Sone and Katsuyuki Machida and Yoshihiro Miyake and Kazuya Masu}, title = {High-Sensitivity Inertial Sensor Module to Measure Hidden Micro Muscular Sounds}, journal = {IEEE Conference Paper}, year = 2019, } @article{CTT100807019, author = {Katsuyuki Machida and Daisuke Yamane and Toshifumi Konishi and Shin-ichi Iida and Noboru Ishihara and Tso-Fu Mark Chang and Masato Sone and Hiroyuki Ito and Kazuya Masu}, title = {MEMS Accelerometer Fabricated by Gold Multi-Layer Metal Technology}, journal = {ECS Transactions}, year = 2019, } @article{CTT100795920, author = {Ken Atsumi and Shota Otobe and Tatsuya Koga and Takashi Ichikawa and Daisuke Yamane and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu}, title = {Pillar-Shaped Electrodes for 3-axis Gold-Proof-Mass MEMS Capacitive Accelerometers}, journal = {IEEE Conference Paper}, year = 2019, } @inproceedings{CTT100807193, author = {Yukiya Tohyama and Hiroaki Honma and Noboru Ishihara and Hidehiko Sekiya and Hiroshi Toshiyoshi and Daisuke Yamane}, title = {Energy Harvesting from Non-Stational Environmental Vibrations using a Voltage-Boost Rectifier Circuit}, booktitle = {}, year = 2019, } @inproceedings{CTT100809253, author = {市川 崇志 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 石原 昇 and 伊藤 浩之 and Chang Tso-Fu Mark and 曽根 正人 and 町田 克之 and 益 一哉}, title = {積層メタル技術で作製したMEMS加速度センサの衝撃特性評価}, booktitle = {}, year = 2019, } @inproceedings{CTT100809254, author = {市川 崇志 and 乙部 翔太 and 渥美 賢 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉}, title = {3Dピラー型Au錘MEMS加速度センサ}, booktitle = {}, year = 2019, } @inproceedings{CTT100811731, author = {伊藤浩之 and 古賀達也 and 市川崇志 and 山根大輔 and 石原昇 and 三宅美博 and 町田克之 and 益一哉}, title = {兆し計測のための高感度MEMS加速度センサ技術}, booktitle = {}, year = 2019, } @inproceedings{CTT100809252, author = {古賀 達也 and 市川 崇志 and 田中 直登 and 緒方 大樹 and 大良 宏樹 and 山根 大輔 and 石原 昇 and 伊藤 浩之 and 曽根 正人 and 町田 克之 and 三宅 美博 and 益 一哉}, title = {微弱筋音計測に向けた高分解能MEMS慣性センサモジュールの検討}, booktitle = {}, year = 2019, } @inproceedings{CTT100807194, author = {市川 崇志 and 乙部 翔太 and 渥美 賢 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 曽根 正人 and 益 一哉}, title = {Au錘3軸MEMS加速度センサのためのSCD電極の検討 (2)}, booktitle = {}, year = 2019, } @inproceedings{CTT100800103, author = {市川 崇志 and 新島 宏文 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉}, title = {3軸Au錘MEMS加速度センサにおける検出電極構造の検討}, booktitle = {}, year = 2019, } @inproceedings{CTT100800105, author = {Yukiya Tohyama and Hiroaki Honma and Noboru Ishihara and Hiroshi Toshiyoshi and Daisuke Yamane}, title = {Bandwidth Enhancement of Vibrational Energy Harvesters by a Voltage-Boost Rectifier Circuit}, booktitle = {}, year = 2019, } @inproceedings{CTT100880818, author = {安藤幹 and 大島佑太 and 平川顕二 and 岩瀬正幸 and 小笠原宗博 and 依田孝 and 石原昇 and 伊藤浩之}, title = {CMOS論理回路におけるTIDの影響評価}, booktitle = {}, year = 2019, } @inproceedings{CTT100790673, author = {渥美 賢 and 乙部 翔太 and 古賀 達也 and 市川 崇志 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉}, title = {積層メタル技術によるピラー型容量検出電極の検討}, booktitle = {}, year = 2019, } @inproceedings{CTT100790674, author = {市川 崇志 and 新島 宏文 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉}, title = {3軸Au錘MEMS加速度センサにおける平行平板型電極の検討}, booktitle = {}, year = 2019, } @inproceedings{CTT100790677, author = {乙部 翔太 and 渥美 賢 and 古賀 達也 and 山根 大輔 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉}, title = {Au錘3軸MEMS加速度センサのためのSCD電極の検討}, booktitle = {}, year = 2019, } @inproceedings{CTT100880813, author = {大島佑太 and 安藤幹 and 平川顕二 and 岩瀬正幸 and 小笠原宗博 and 依田孝 and 石原昇 and 伊藤浩之}, title = {TID影響下におけるMOSFETの動的特性劣化モデルの開発}, booktitle = {}, year = 2019, } @inproceedings{CTT100782446, author = {Daisuke Yamane and Shota Otobe and Ken Atsumi and Tatsuya Koga and Toshifumi Konishi and Teruaki Safu and Shinichi Iida and Hiroyuki Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu}, title = {A 3-D PARALLEL-PLATE MEMS ACCELEROMETER WITH A GOLD PROOF MASS}, booktitle = {}, year = 2019, } @misc{CTT100814171, author = {石原昇 and 伊藤浩之 and 道正志郎 and 益一哉}, title = {無線センサおよびセンサネットワークシステム}, howpublished = {公開特許}, year = 2019, month = {}, note = {特願2018-034546(2018/02/28), 特開2019-149090(2019/09/05)} }