@article{CTT100887414,
  author = {Mie Tohnishi and Mina Sato and Akihiro Matsutani and Takashi Ubukata and Sachiko Matsushita},
  title = {Surface Treatment of Polyimide using Solid-source H2O Plasma for Fabrication of Ge Electrode},
  journal = {Sensors and Materials},
  year = 2023,
}

@article{CTT100885535,
  author = {Ryo Tsukui and Masaru Kino and Kodai Yamamoto and Mina Sato and Mie Tohnishi and Akihiro Matsutani and Mikio Kurita},
  title = {Laboratory demonstration of the birefrigent point-diffraction interferometer wavefront sensor},
  journal = {Optics Continuum},
  year = 2023,
}

@inproceedings{CTT100906526,
  author = {Mie Tohnishi and Sachiko Matsushita and Akihiro Matsutani},
  title = {Fabrication of nonreflective black germanium in near-infrared region up to a wavelength of 2.5 µm by SF6+O2/C4F8-plasma-based deep reactive ion etching},
  booktitle = {Proceedings of International Symposium on Dry Process},
  year = 2023,
}

@inproceedings{CTT100903970,
  author = {松谷晃宏 and 遠西美重},
  title = {デジタルカメラと回折格子によるSi のDeep-RIE プラズマの発光分光測定と EDX による高アスペクト比（HAR）エッチング側壁の分析の比較},
  booktitle = {},
  year = 2023,
}

@inproceedings{CTT100903971,
  author = {遠西美重 and 松谷晃宏 and 松下祥子},
  title = {Deep-RIE により作製したブラックGe 微細構造側壁のEDX 分析},
  booktitle = {},
  year = 2023,
}

@inproceedings{CTT100891318,
  author = {佐藤 美那 and 遠西美重 and 松谷晃宏},
  title = {Ar+ビーム照射により作製したKOHエッチング用SiマスクのXPS解析},
  booktitle = {},
  year = 2023,
}

@inproceedings{CTT100887411,
  author = {遠西 美重 and 松谷晃宏 and 生方 俊 and 松下祥子},
  title = {固体ソースH₂Oプラズマ処理したポリイミド樹脂の表面のXPS分析},
  booktitle = {},
  year = 2023,
}