@article{CTT100709249,
  author = {Yang-Che Chen and Tadashi Ishida and Hiroshi Toshiyoshi and Rongshun Chen and Hiroyuki Fujita},
  title = {Spontaneous oscillation due to electrical charging effect in MEMS electrostatic switches},
  journal = {IEEJ Transactions on Sensors and Micromachines},
  year = 2014,
}