@inproceedings{CTT100907060, author = {Yukihide Kohira and Haruki Nakayama and Naoki Nonaka and Tomomi Matsui and Atsushi Takahashi and Chikaaki Kodama}, title = {A formulation of mask optimization into QUBO model for Ising machines}, booktitle = {Proc. SPIE 12751, Photomask Technology 2023, 127511D}, year = 2023, }