@misc{CTT100885389,
  author = {大場隆之},
  title = {半導体装置及びその製造方法},
  howpublished = {公開特許},
  year = 2022,
  month  = {},
  note   = {特願2021-067855(2021/04/13), 特開2022-162831(2022/10/25)}
}


@misc{CTT100883377,
  author = {大場隆之},
  title = {半導体装置及びその製造方法},
  howpublished = {公開特許},
  year = 2022,
  month  = {},
  note   = {特願2020-217060(2020/12/25), 特開2022-102370(2022/07/07)}
}


@misc{CTT100883381,
  author = {大場隆之},
  title = {半導体装置及びその製造方法},
  howpublished = {公開特許},
  year = 2022,
  month  = {},
  note   = {特願2020-217061(2020/12/25), 特開2022-102371(2022/07/07)}
}