@inproceedings{CTT100902988, author = {Ryosuke Kajikawa and Takamasa Kawanago and Iriya Muneta and Takuya Hoshii and Kuniyuki Kakushima and Kazuo Tsutsui and Hitoshi Wakabayashi}, title = {Self-Aligned WOx S/D Contacts to Gate Stacks with TiOx Nucleation Layer by Multiple-Deposition Method in WSe2 pFETs}, booktitle = {}, year = 2023, } @inproceedings{CTT100903418, author = {梶川 亮介 and 川那子 高暢 and 宗田 伊理也 and 星井 拓也 and 角嶋 邦之 and 筒井 一生 and 若林 整}, title = {トップゲートに自己整合したWOx S/Dを用いた30-50 nm膜厚WSe2バックチャネルpFET}, booktitle = {}, year = 2023, } @misc{CTT100894462, author = {星井拓也 and 筒井一生}, title = {pチャネルGaNMOSデバイス及びその製造方法}, howpublished = {公開特許}, year = 2023, month = {}, note = {特願2021-137005(2021/08/25), 特開2023-031488(2023/03/09)} }