@article{CTT100866853,
  author = {Akira Onishi and Kohei Shibata and Akihiro Uchiyama and Katsuyuki  Machida and Taiki  Ogata and Noboru  Ishihara and Hirotaka Uchitomi and Tso-Fu Mark  Chang and Masato Sone and Yoshihiro Miyake and Hiroyuki  Ito},
  title = {Suppressed Drift and Low-Noise Sensor Module  with a Single-Axis Gold Proof-Mass MEMS Accelerometer for Micro Muscle Sound Measurement},
  journal = {Japanese Journal of Applied Physics},
  year = 2022,
}