@article{CTT100814283, author = {P. T. Tue and Reijiro Shimura and T. Shimoda and Yuzuru Yakamura}, title = {Direct integration of piezo-actuator array with active-matrix oxide thin-film transistors using a low-temperature solution process}, journal = {Sensors and Actuators A: Physical}, year = 2019, } @inproceedings{CTT100821765, author = {志村礼司郎 and 三村和仙 and 清水荘雄 and 舟窪浩}, title = {スパッタリング法を用いたY:HfO2強誘電体厚膜の作製とその電気特性評価}, booktitle = {}, year = 2019, } @inproceedings{CTT100806476, author = {志村礼司郎 and 三村和仙 and 清水荘雄 and 舟窪浩}, title = {スパッタリング法により配向制御したHfO2基強誘電体厚膜の作製およびその電気特性評価}, booktitle = {}, year = 2019, }