@article{CTT100864745, author = {Shinya Kondo and Reijiro Shimura and Takashi Teranishi and Akira Kishimoto and Takanori Nagasaki and Hiroshi Funakubo and Tomoaki Yamada}, title = {Influence of orientation on electro-optic effect in epitaxial Y-doped HfO2 ferroelectric thin films}, journal = {Jpn. J. Appl. Phys.}, year = 2021, } @article{CTT100863340, author = {Shinya Kondo and Reijiro Shimura and Takashi Teranishi and Akira Kishimoto and Takanori Nagasaki and Hiroshi Funakubo and Tomoaki Yamada}, title = {Linear electro-optic effect in CMOS-compatible ferroelectric HfO2-based epitaxial thin films}, journal = {Jpn. J. Appl. Phys. RAPID COMMUNICATION}, year = 2021, } @article{CTT100852331, author = {Reijiro Shimura and Takanori Mimura and Akinori Tateyama and Takao Shimizu and Tomoaki Yamada and Hiroshi Funakubo}, title = {Preparation of 1 μm-thick Y-doped HfO2 ferroelectric films on (111)Pt/TiOx/SiO2/(001)Si substrates by a sputtering method and their ferroelectric and piezoelectric properties}, journal = {Jpn. J. Appl. Phys.}, year = 2021, } @inproceedings{CTT100874648, author = {Shinya Kondo and Reijiro Shimura and Takashi Teranishi and Akira Kishimoto and Takanori Nagasaki and Hiroshi Funakubo and Tomoaki Yamada}, title = {Electro-optic properties in ferroelectric HfO2-based epitaxial thin films}, booktitle = {}, year = 2021, } @inproceedings{CTT100867236, author = {近藤真矢 and 志村礼司郎 and 寺西貴志 and 岸本昭 and 長崎正雅 and 舟窪浩 and 山田智明}, title = {Y添加HfO2強誘電体エピタキシャル薄膜の電気光学効果}, booktitle = {}, year = 2021, } @inproceedings{CTT100865369, author = {Funakubo, H. and Shimura, R. and Mimura, T. and Tateyama, A. and Nakamura, Y. and Shimizu, T. and Yamada, T. and Tanaka, Y. and Inoue, Y.}, title = {Low temperature preparation of thick Y-HfO2 ferroelectric films}, booktitle = {}, year = 2021, } @inproceedings{CTT100867239, author = {高橋雄真 and 白石貴久 and 小寺正徳 and 志村礼司郎 and 三村和仙 and 森分博紀 and 田口綾子 and 舟窪浩}, title = {HfO2基強誘電体膜のラマン分光測定}, booktitle = {}, year = 2021, } @inproceedings{CTT100865541, author = {近藤真矢 and 志村礼司郎 and 舟窪浩 and 寺西貴志 and 岸本昭 and 山田智明}, title = {エピタキシャルHfO2基強誘電体薄膜の電気光学特性}, booktitle = {}, year = 2021, } @inproceedings{CTT100865036, author = {Hiroshi Funakubo and Takanori Mimura and Reijiro Shimura and Yoshiko Nakamura and Takao Shimizu}, title = {Stability and Room Temperature Deposition of Ferroelectric Phase in Y-Doped (Hf, Zr)O2 Films}, booktitle = {}, year = 2021, } @inproceedings{CTT100853373, author = {海老原凌 and 吉田慎哉 and 志村礼司郎 and 舟窪浩 and 田中秀治}, title = {Y2O3-HfO2強誘電体薄膜を搭載したMEMSユニモルフカンチレバーの作製と特性評価}, booktitle = {}, year = 2021, } @inproceedings{CTT100853366, author = {志村礼司郎 and 三村和仙 and 舘山明紀 and 清水荘雄 and 白石貴久 and 舟窪浩}, title = {スパッタリング法によるY-HZO強誘電体厚膜の室温製膜とその電気特性および圧電特性評価}, booktitle = {}, year = 2021, }