@article{CTT100874609,
  author = {Reijiro Shimura and Takanori Mimura and Akinori Tateyama and Takahisa Shiraishi and Takao Shimizu and Tomoaki Yamada and Yoshitomo Tanaka and Yukari Inoue and Hiroshi Funakubo},
  title = {No-Heating Deposition of 1-μm-Thick Y-Doped HfO2 Ferroelectric Films with Good Ferroelectric and Piezoelectric Properties by Radio Frequency Magnetron Sputtering Method},
  journal = {Phys. Status Solidi RRL},
  year = 2022,
}