@inproceedings{CTT100867239, author = {高橋雄真 and 白石貴久 and 小寺正徳 and 志村礼司郎 and 三村和仙 and 森分博紀 and 田口綾子 and 舟窪浩}, title = {HfO2基強誘電体膜のラマン分光測定}, booktitle = {}, year = 2021, }