@article{CTT100915391, author = {Keren Lin and Thijs van der Gaag and Wataru Kikuchi and Hiroshi Akatsuka and Motoshi Goto}, title = {OES diagnostics of atmospheric pressure argon plasma: Electron temperature and density assessment through visible bremsstrahlung inversion method and collisional-radiative model}, journal = {Applied Physics Letters}, year = 2024, } @article{CTT100911911, author = {Wataru Kikuchi and Yuya Yamashita and Atsushi Nezu and Hiroshi Akatsuka}, title = {Spectroscopic Measurement of Atmospheric-pressure Non-equilibrium Ar Plasma Using Continuum and Line Spectra}, journal = {Journal of Physics D: Applied Physics}, year = 2024, } @article{CTT100908519, author = {Yuya Yamashita and Kenta Doi and Tetsuji Kiyota and Kenta Ishi and Shuhei Watanabe and Wataru Kikuchi and Atsushi Nezu and Hiroshi Akatsuka}, title = {Spatial distribution diagnosis of electron temperature and density of argon inductively coupled plasma by tomographic optical emission spectroscopic measurement and collisional-radiative model}, journal = {J. Vac. Sci. Technol. A}, year = 2024, } @inproceedings{CTT100919093, author = {Yuya Yamashita and Kenta Doi and Tetsuji Kiyota and Shuhei Watanabe and Kazuki Shimatani and Wataru Kikuchi and Yuchen Ye and Atsushi Nezu and Hiroshi Akatsuka}, title = {Electron temperature diagnosis of CF4/O2 plasma based on fluorine atomic corona model by tomographic optical emission spectroscopic measurement}, booktitle = {Proceedings of ESCAMPIG2024}, year = 2024, } @inproceedings{CTT100919092, author = {Wataru Kikuchi and Yuya Yamashita and Atsushi Nezu and Hiroshi Akatsuka}, title = {Spectroscopic Measurement of Atmospheric-pressure Non-equilibrium Ar Plasma Based on Line Spectra with Undetected Level Densities}, booktitle = {Proceedings of 50th EPS Conference on Plasma Physics}, year = 2024, } @inproceedings{CTT100910225, author = {山下 雄也 and 土居 謙太 and 清田 哲司 and 渡邊 修平 and 島谷 和希 and 菊地 航行 and 根津 篤 and 赤塚 洋}, title = {トモグラフィック発光分光計測によるフッ素原子コロナモデルに基づくCF4/O2プラズマの電子温度診断}, booktitle = {第71回応用物理学会春季学術講演会 講演予稿集}, year = 2024, } @inproceedings{CTT100910224, author = {菊地 航行 and 山下 雄也 and 根津 篤 and 赤塚 洋}, title = {大気圧非平衡 Ar プラズマの連続・線スペクトルに基づいた重み付き解析}, booktitle = {第71回応用物理学会春季学術講演会 講演予稿集}, year = 2024, } @inproceedings{CTT100908454, author = {渡邊修平 and 土居謙太 and 清田哲司 and 山下雄也 and 菊地航行 and 石健太 and 根津篤 and 赤塚洋}, title = {誘導結合酸素プラズマの発光分光計測}, booktitle = {第41回 プラズマプロセシング研究会 プロシーディングス}, year = 2024, } @inproceedings{CTT100908457, author = {山下雄也 and 土居謙太 and 清田哲司 and 菊地航行 and 石健太 and 渡邊修平 and 根津篤 and 赤塚洋}, title = {改良分光トモグラフィアルゴリズムによるアルゴン誘導結合プラズマの電子温度・電子密度の空間分布診断}, booktitle = {第41回 プラズマプロセシング研究会 プロシーディングス}, year = 2024, } @inproceedings{CTT100908455, author = {山下航平 and 菊地航行 and 石健太 and 榎本純 and 根津篤 and 赤塚洋}, title = {Ar/N2混合大気圧非平衡プラズマにおける振動温度・回転温度の発光分光計測}, booktitle = {第41回 プラズマプロセシング研究会 プロシーディングス}, year = 2024, }