@inproceedings{CTT100703838,
  author = {杉原拓実 and 酒井洋輔 and 廣井誉 and 田中雅慶 and 河合良信},
  title = {微結晶シリコン薄膜用高圧・狭ギャップVHFプラズマ特性},
  booktitle = {},
  year = 2010,
}

@inproceedings{CTT100703839,
  author = {杉原拓実 and 廣井誉 and 田中雅慶 and 河合良信},
  title = {微結晶シリコン製膜用高圧狭ギャップVHFプラズマ特性},
  booktitle = {},
  year = 2010,
}