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大村太郎 2022年 研究業績一覧 (3件 / 11件)
論文
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Taro Omura,
Chun-Yi Chen,
Tso-Fu Mark Chang,
Daisuke Yamane,
Hiroyuki Ito,
Katsuyuki Machida,
Kazuya Masu,
Masato Sone.
Effect of Current Density on Micro-Mechanical Property of Electrodeposited Gold Film Evaluated by Micro-Compression,
Surface & Coatings Technology,
Elsevier,
Vol. 436,
p. 128315,
Feb. 2022.
公式リンク
国際会議発表 (査読有り)
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Taro Omura,
Chun-Yi Chen,
Tomoyuki Kurioka,
Tso-Fu Mark Chang,
Akira Onishi,
Parthojit Chakraborty,
Katsuyuki Machida,
Hiroyuki Ito,
Yoshihiro Miyake,
Masato Sone.
Warpage Characteristics of Gold Proof Mass in MEMS Capacitive Accelerometer,
48th international conference on Micro and Nano Engineering - Eurosensors (MNE-ES),
Sept. 2022.
国内会議発表 (査読有り)
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