@article{CTT100902217, author = {Ryoya Kai and Tomoaki Oga and Kazuki Watanabe and Satoru Kaneko and Akifumi Matsuda and Mamoru Yoshimoto}, title = {Fabrication of highly-oriented β-Ga2O3 thin film on ZnO/AlOx-buffered cyclo-olefin polymer substrate by excimer laser annealing at room temperature}, journal = {Japanese Journal of Applied Physics}, year = 2023, }