@inproceedings{CTT100618697,
  author = {Eiki Hotta and Nozomu Kishi and Junzaburo Yamada and Qiushi Zhu and Tomonao Hosokai and Masato Watanabe and Akitoshi Okino},
  title = {Plasma Dynamics in Laser Triggered Vacuum Arc Sn DPP EUV Source},
  booktitle = {},
  year = 2008,
}

@inproceedings{CTT100618698,
  author = {Osamu Sakuchi and Fei Jiang and Junzaburo Yamada and Qiushi Zhu and Masato Watanabe and Tohru Kawamura and Akitoshi Okino and Kazuhiko Horioka and Eiki Hotta},
  title = {Development of Xenon Gas-Jet Z-Pinch Discharge and Laser Triggered Tin Discharge Light Sources for EUV Lithography},
  booktitle = {ICPP2008 Abstracts},
  year = 2008,
}

@inproceedings{CTT100566019,
  author = {Masato Watanabe and Junzaburo Yamada and Qiushi Zhu and Eiki Hotta},
  title = {Development of Extreme Ultraviolet Radiation Source using Laser Triggered Vacuum Spark Discharge Plasma},
  booktitle = {},
  year = 2008,
}

@inproceedings{CTT100618695,
  author = {Qiushi Zhu and Junzaburo Yamada and Nozomu Kishi and Tomonao Hosokai and Masato Watanabe and Akitoshi Okino and Eiki Hotta},
  title = {Study on Sn-Fueled Discharge Produced Plasma (DPP) Extreme Ultraviolet (EUV) Source},
  booktitle = {},
  year = 2008,
}

@inproceedings{CTT100618699,
  author = {Masato Watanabe and Nozomu Kishi and Junzaburo Yamada and Osamu Sakuchi and Jiang Fei and Zhu Qiushi and Akitoshi Okino and Kazuhiko Horioka and Eiki Hotta},
  title = {Experimental Study on Xenon and Tin Discharge Produced Plasma EUV Light Source},
  booktitle = {IEEE Conference Record Abstracts The 35th IEEE International Conference on Plasma Science},
  year = 2008,
}

@inproceedings{CTT100618696,
  author = {Qiushi Zhu and Junzaburo Yamada and Nozomu Kishi and Masato Watanabe and Akitoshi Okino and Eiki Hotta},
  title = {EUV Radiation from Laser Triggered Tin Target Discharge Produced Plasma},
  booktitle = {},
  year = 2008,
}

@inproceedings{CTT100618700,
  author = {山田 淳三郎 and ｽﾞ ｷｭｼ and 岸 望 and 渡邊 正人 and MASNAVI MAJID and 沖野 晃俊 and 河村 徹 and 堀岡 一彦 and 堀田 栄喜},
  title = {レーザトリガ型Sn EUV放電光源の開発},
  booktitle = {電気学会パルスパワー・放電合同研究会資料},
  year = 2008,
}

@inproceedings{CTT100552076,
  author = {渡邊正人 and 岸望 and 山田淳三郎 and 堀田栄喜},
  title = {レーザトリガ型EUV放電光源の開発},
  booktitle = {平成２０年電気学会全国大会講演論文集},
  year = 2008,
}