@inproceedings{CTT100645586, author = {T. Muto and Q. Zhu and J. Yamada and N. Kishi and M. Watanabe and E. Hotta}, title = {Estimation of Electron Temperature and Density of the Decay Plasma in a Laser-assisted Discharge Plasma Extreme Ultraviolet Source by using a Modified Stark Broadening Method}, booktitle = {}, year = 2012, }