@inproceedings{CTT100680941, author = {R. Wakabayashi and M. Hattori and T. Oshima and A. Mukai and K. Sasaki and T. Masui and A. Kuramata and S. Yamakoshi and K. Yoshimatsu and A. Ohtomo}, title = {Oxygen-radical-assisted pulsed-laser deposition of β-(AlxGa1-x)2O3 alloy films}, booktitle = {}, year = 2014, }