@article{CTT100875617, author = {Ryo Ono and Shinya Imai and Yuta Kusama and Takuya Hamada and Masaya Hamada and Iriya Muneta and Kuniyuki Kakushima and Kazuo Tsutsui and Emi Kano and Nobuyuki Ikarashi and Hitoshi Wakabayash}, title = {Elucidation of PVD MoS2 Film Formation Process and its Structure Focusing on Sub-Monolayer Region}, journal = {Japanese Journal of Applied Physics (JJAP)}, year = 2022, } @inproceedings{CTT100896547, author = {今井 慎也 and 小野 凌 and 宗田 伊理也 and 角嶋 邦之 and 辰巳 哲也 and 冨谷 茂隆 and 筒井 一生 and 若林 整}, title = {MoS2膜質のスパッタ成膜レート依存性調査}, booktitle = {}, year = 2022, } @inproceedings{CTT100896548, author = {小野 凌 and 今井 慎也 and 宗田 伊理也 and 角嶋 邦之 and 筒井 一生 and 若林 整}, title = {微結晶MoS2膜への硫黄雰囲気アニールによる結晶性向上}, booktitle = {}, year = 2022, }