@inproceedings{CTT100858465,
  author = {Nobuyuki TAKAHASHI and Seiichiro HARA},
  title = {Wide-area Surface Profile Measurement by Confocal Laser Microscope Using Tilted Focal Plane},
  booktitle = {Proceedings of The 5th International Conference on Design Engineering and Science ICDES 2020},
  year = 2020,
}