@article{CTT100802258, author = {前田 康貴 and 大見俊一郎 and 後藤 哲也 and 大見 忠弘}, title = {窒素添加LaB₆薄膜のデバイス応用に関する検討 (シリコン材料・デバイス)}, journal = {電子情報通信学会技術研究報告 = IEICE technical report : 信学技報}, year = 2013, } @article{CTT100801564, author = {Han, H.S. and Han, D.H. and Shun-ichiro OHMI}, title = {Potential of MISFET with HfN gate dielectric formed by ECR plasma sputtering}, journal = {Electronics Letters}, year = 2013, }