@article{CTT100759551, author = {T. Ohashi and K. Suda and S. Ishihara and N. Sawamoto and S. Yamaguchi and K. Matsuura and K. Kakushima and N. Sugii and A. Nishiyama and Y. Kataoka and K. Natori and K. Tsutsui and H. Iwai and A. Ogura and H. Wakabayashi}, title = {Multi-layered MoS2 film formed by high-temperature sputtering for enhancement-mode nMOSFETs}, journal = {Japan Journal of Applied Physics}, year = 2015, } @inproceedings{CTT100780943, author = {S. Ishihara and K. Suda and Y. Hibino and N. Sawamoto and T. Ohashi and S. Yamaguchi and K. Matsuura and H. Machida and M. Ishikawa and H. Sudoh and H. Wakabayashi and A. Ogura}, title = {Evaluation of Sputtering Deposited 2-Dimensional MoS2 Film by Raman Spectroscopy}, booktitle = {MRS Proceedings}, year = 2015, } @inproceedings{CTT100780944, author = {S. Ishihara and K. Suda and Y. Hibino and N. Sawamoto and T. Ohashi and S. Yamaguchi and K. Matsuura and H. Machida and M. Ishikawa and H. Sudoh and H. Wakabayashi and A. Ogura}, title = {Improving Crystalline Quality of Sputtering Deposited MoS2 Thin Film by Post-Deposition Sulfurization Annealing Using (t-C4H9)2S2}, booktitle = {}, year = 2015, } @inproceedings{CTT100780945, author = {S. Ishihara and Y. Hibino and N. Sawamoto and K. Suda and T. Ohashi and K. Matsuura and H. Machida and M. Ishikawa and H. Sudoh and H. Wakabayashi and A. Ogura}, title = {Properties of Single-Layer MoS2 Film Fabricated by Combination of Sputtering Deposition and Post-Deposition Sulfurization Annealing Using (t-C4H9)2S2}, booktitle = {}, year = 2015, } @inproceedings{CTT100780946, author = {S. Ishihara and Y. Hibino and N. Sawamoto and K. Suda and T. Ohashi and K. Matsuura and H. Machida and M. Ishikawa and H. Sudoh and H. Wakabayashi and A. Ogura}, title = {Fabrication of High-Quality Single- and Few-Layer MoS2 Films by Combination of Sputtering Deposition and Post-Deposition Sulfurization Annealing}, booktitle = {}, year = 2015, } @inproceedings{CTT100780947, author = {Y. Hibino and S. Ishihara and N. Sawamoto and T. Ohashi and K. Matsuura and H. Machida and M. Ishikawa and H. Sudoh and H. Wakabayashi and A. Ogura}, title = {Low Temperature Formation of Layered MoS2 by Sulfurization of E-Beam Evaporated Mo Thin Film Using (t-C4H9)2S2}, booktitle = {}, year = 2015, }