@inproceedings{CTT100734201,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hideaki Nakajima and Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Masato Sone and Hiroshi Toshiyoshi and Kazuya Masu},
  title = {Young’s modulus evaluation of electroplated Ti/Au structures for MEMS devices},
  booktitle = {},
  year = 2016,
}