@article{CTT100766271, author = {Yukihide Kohira and Chikaaki Kodama and Tomomi Matsui and Atsushi Takahashi and Shigeki Nojima and Satoshi Tanaka}, title = {Yield-aware mask assignment by positive semidefinite relaxation in triple patterning using cut process}, journal = {Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3)}, year = 2016, } @inproceedings{CTT100734126, author = {Yukihide Kohira and Atsushi Takahashi and Tomomi Matsui and Chikaaki Kodama and Shigeki Nojima and Satoshi Tanaka}, title = {Manufacturability-aware Mask Assignment in Multiple Patterning Lithography}, booktitle = {Proc. the 2016 IEEE Asia-Pacific Conference on Circuits and Systems (APCCAS 2016)}, year = 2016, }