@article{CTT100785326,
  author = {Motohiro Takayasu and Ippei Tsuji and Hiroyuki Ito and Daisuke Yamane and Shiro Dosho and Toshifumi Konishi and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {Microgravity Generation Using Tilting Board for Resolution Evaluation of MEMS Accelerometer},
  journal = {Sensors and Materials},
  year = 2018,
}

@article{CTT100811702,
  author = {Motoaki Hara and Yuichiro Yano and Masatoshi Kajita and Hitoshi Nishino and Yasuhiro Ibata and Shinsuke  Hara and Masaya Toda and Akifumi Kasamatsu and Hiroyuki Ito and Takahito Ono and Tetsuya Ido},
  title = {Microwave oscillator using piezoelectric thin-film resonator aiming for ultraminiaturization of atomic clock},
  journal = {Review of Scientific Instruments},
  year = 2018,
}

@article{CTT100766253,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Shin-ichi Iida and Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {Temperature Characteristics of MEMS Inertial Sensor Fabricated by Gold Multi-Layer Metal Technology},
  journal = {},
  year = 2018,
}

@article{CTT100759250,
  author = {Motohiro Takayasu and Shiro Dosho and Hiroyuki Ito and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Noboru Ishihara and Kazuya Masu},
  title = {A 0.18-?m CMOS time-domain capacitive-sensor interface for sub-1mG MEMS accelerometers},
  journal = {IEICE Electronics Express},
  year = 2018,
}

@inproceedings{CTT100779594,
  author = {Daisuke Yamane and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu},
  title = {Sub-1mG MEMS Inertial Sensor for Biomedical Applications},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100777398,
  author = {Shota Otobe and Tatsuya Koga and Ken Atsumi and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Shin-ichi Iida and Hiroyuki. Ito and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {A Sub-1mG Tri-Axis MEMS Accelerometer with Multiple Segmented Capacitance Detection Electrodes},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100780828,
  author = {Hiroyuki Ito},
  title = {Ultra-Low Power RF Circuit Technologies for IoT},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100775380,
  author = {乙部 翔太 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {シングルAu錘と分割電極容量検出(SCD)方式を用いた3軸全差動MEMS加速度センサ},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100775377,
  author = {古賀 達也 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {1軸MEMS加速度センサのAu錘厚膜化による高性能化の検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100772111,
  author = {Ken Hashigata and Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone.},
  title = {Electrodeposition of Gold on Titanium and Bending Test of Au-Ti Bi-Layered Micro-Cantilever},
  booktitle = {IUMRS-ICA 2018},
  year = 2018,
}

@inproceedings{CTT100775374,
  author = {市川 崇志 and 新島 宏文 and 古賀 達也 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 飯田 慎一 and 伊藤 浩之 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {Au単一錘平行平板型3軸MEMS加速度センサの検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100786703,
  author = {Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Solid Solution Strengthening of Gold Based Materials  for MEMS Applications},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100780824,
  author = {原基揚 and 矢野雄一郎 and 梶田雅稔 and 西野仁 and 戸田雅也 and 原紳介 and 笠松章史 and 伊藤浩之 and 小野崇人 and 井戸哲也},
  title = {圧電薄膜共振子を利用した3.5 GHz帯CMOS発振回路の開発 と原子時計システムへの適用},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100780817,
  author = {原基揚 and 矢野雄一郎 and 梶田雅稔 and 原紳介 and 笠松章史 and 伊藤浩之 and 井戸哲也},
  title = {Rb時計周波数の直接発振を目的としたFBAR-VCOの開発},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100769741,
  author = {Takahiro Yamamoto and Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Mechanical Property and Thermal Stability of Electrodeposited Au-Cu Alloys  for Reliability of MEMS Devices},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769735,
  author = {Koichiro Tachibana and Chun-Yi Chen and Tso-Fu Mark Chang and Kyotaro Nitta and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Reliability Characteristics of Ti/Au Micro-Cantilever by Long-Term Vibration Test},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769736,
  author = {Kyotaro Nitta and Koichiro Tachibana and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Cu-Alloying Effect on Structure Stability of Au Micro-Cantilever},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769737,
  author = {Keisuke Asano and Hao-chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Electrodeposited Au-Cu Alloy with High Yield Stress Evaluated by Micro-Bending Test},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769738,
  author = {Ken Hashigata and Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Mechanical Strength Enhancement of Ti/Au Layered Structure Evaluated by Micro-Bending Test},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769739,
  author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Young’s Modulus of Ti/Au Micro-Cantilever by Resonance Frequency Method toward Au-Based MEMS Device},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769740,
  author = {Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshib and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {High Strength Electrodeposited Gold-Copper Alloys for MEMS Devices},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769742,
  author = {Hitomi Watanabe and Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Effects of Ti/Au Layered Structure on Temperature Dependence of Micro-Cantilever Structure Stability},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100771219,
  author = {Daisuke Yamane and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu},
  title = {High-Resolution MEMS Accelerometer by Multi-Layer Metal Technology},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100772037,
  author = {伊藤浩之 and 鹿島 光司 and 深水 克郎 and 永野風矢 and 大場隆之},
  title = {密閉型稲水耕栽培装置の試作と評価},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100772124,
  author = {Masato Sone and Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Hiroyuki Ito and Kazuya Masu},
  title = {EFFECTIVE YOUNG’S MODULUS EVALUATION OF TI/AU MICRO STRUCTURES FOR MEMS ACCELEROMETER},
  booktitle = {8th research workshop "NEW METHODS OF DAMAGE AND FAILURE ANALYSIS OF STRUCTURAL PARTS"},
  year = 2018,
}

@inproceedings{CTT100771220,
  author = {Kazuya Masu and Daisuke Yamane and Hiroyuki Ito and Katsuyuki Machida and Tso-Fu Mark Chang and Masato Sone and Yoshihiro Miyake},
  title = {CMOS-MEMS accelerometer with gold proof-mass and its application in diagnosis of Parkinsons Disease},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100768386,
  author = {Chun-Yi Chen and Hao-Chun Tang and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Ultra-high Strength in Electroplated Nanocrystalline Au-Cu Alloys Evaluated by Micro-Compression Tests for MEMS Devices},
  booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan},
  year = 2018,
}

@inproceedings{CTT100768387,
  author = {Koichiro Tachibana and Chun-Yi Chen and Tso-Fu Mark Chang and Kyoutarou Nitta and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Structure stability of Ti/Au micro-cantolever evaluated by long-term vibration test},
  booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan},
  year = 2018,
}

@inproceedings{CTT100768308,
  author = {HIdeaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and HIroshi Toshiyoshi and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {A Study on Effective Young’s Modulus of Micro-Cantilevers Fabricated by Au Electroplating},
  booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan},
  year = 2018,
}

@inproceedings{CTT100768649,
  author = {Masato Sone and Hao-Chun Tang and Chun-yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu},
  title = {Characteristics of Electroplated Gold Material with Multilayer Metal Technology for CMOS-MEMS Accelerometer},
  booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan},
  year = 2018,
}

@inproceedings{CTT100769399,
  author = {Shota Otobe and Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Katsuyuki Machida and Kazuya Masu},
  title = {Tri-Axis Fully-Differential MEMS Accelerometer with Segmented Capacitance Detection},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100768307,
  author = {Kyotaro Nitta and Koichiro Tachibana and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Reliability Evaluation of Au-Cu Microcantilever by Long-Term Vibration Test toward MEMS Components},
  booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan},
  year = 2018,
}

@inproceedings{CTT100772038,
  author = {伊藤浩之 and 山根大輔 and 小西敏文 and 道正志郎 and 石原昇 and 町田克之 and 曽根正人 and 三宅美博 and 益一哉},
  title = {MEMS加速度センサと生体計測への応用},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100780820,
  author = {Motoaki Hara and Yuichiro Yano and Masatoshi Kajita and Shinsuke  Hara and Akifumi Kasamatsu and Hiroyuki Ito and Takahito Ono and Tetsuya Ido},
  title = {FBAR-based 3.4 GHz Oscillator without Frequency Multiplications Aiming for an Integrated Atomic Clock Chip},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760620,
  author = {伊藤 浩之 and ?根 ?輔 and 小西敏文 and 道正 志郎 and ?原 昇 and 町? 克之 and 曽根 正? and 三宅 美博 and 益 ?哉},
  title = {集積化CMOS-MEMS技術による?感度慣性センサと応?システム},
  booktitle = {応用物理学会第65回春季講演会},
  year = 2018,
}

@inproceedings{CTT100760932,
  author = {宮内 楓 and 田口 泰地 and 石川 洋介 and 伊藤 浩之 and 道正 志郎 and 益 一哉 and 石原 昇},
  title = {RFバックスキャッタリングによる低電力ワイヤレスセンサ端末モジュールの試作評価結果},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760840,
  author = {ヨ ジヨン and 伊藤浩之 and 石原 昇 and 道正志郎 and 益 一哉},
  title = {音波・電波ハイブリッドによる測距技術の基礎検討},
  booktitle = {信学技報},
  year = 2018,
}

@inproceedings{CTT100760808,
  author = {古賀 達也 and 高安 基大 and 山根 大輔 and 伊藤 浩之 and 小西 敏文 and 道正 志郎 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {積層メタル技術で作製したMEMS慣性センサのモジュール化の検討(2)},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760805,
  author = {新島 宏文 and 乙部 翔太 and 高安 基大 and 山根 大輔 and 小西 敏文 and 佐布 晃昭 and 伊藤 浩之 and 年吉 洋 and 町田 克之 and 益 一哉},
  title = {高感度MEMS加速度センサのBrownian Noise評価に関する検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760803,
  author = {小西 敏文 and 山根 大輔 and 佐布 晃昭 and 陳 君怡 and Chang Tso-Fu Mark and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉 and 飯田 慎一},
  title = {積層メタル技術を用いたMEMS慣性センサの封止環境における温度依存性},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760802,
  author = {伊藤 浩之 and 山根 大輔 and 小西 敏文 and 道正 志郎 and 石原 昇 and 町田 克之 and 曽根 正人 and 三宅 美博 and 益 一哉},
  title = {集積化CMOS-MEMS技術による高感度慣性センサと応用システム},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760801,
  author = {新島 宏文 and 乙部 翔太 and 高安 基大 and 山根 大輔 and 伊藤 浩之 and 佐布 晃昭 and 小西 敏文 and 道正 志郎 and 飯田 慎一 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {単一Au錘3軸差動MEMS加速度センサの検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100760797,
  author = {高安 基大 and 古賀 達也 and 辻 一平 and 伊藤 浩之 and 山根 大輔 and 道正 志郎 and 小西 敏文 and 飯田 慎一 and 石原 昇 and 町田 克之 and 益 一哉},
  title = {傾斜を用いた1mG MEMS加速度センサの分解能評価の検討},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100780809,
  author = {伊藤浩之},
  title = {アグリエレクトロニクスの研究 ―植物のキモチセンシングを目指して―},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100758754,
  author = {Motoaki Hara and Yuichiro Yano and Masatoshi Kajita and Hitoshi Nishino and Yasuhiro Ibata and Masaya Toda and Shinsuke  Hara and Akifumi Kasamatsu and Hiroyuki Ito and Takahito Ono and Tetsuya Ido},
  title = {Micro Atomic Frequency Standards Employing an Integrated FBAR-VCO Oscillating on the 87Rb Clock Frequency without a Phase-Locked Loop},
  booktitle = {},
  year = 2018,
}

@misc{CTT100835046,
  author = {曽根正人 and Tso-Fu Mark Chang and 陳君怡 and 町田克之 and 山根大輔 and 伊藤浩之 and 益一哉},
  title = {貴金属またはその合金の微細結晶組織を有する金属材料},
  howpublished = {公開特許},
  year = 2020,
  month  = {},
  note   = {特願2018-239826(2018/12/21), 特開2020-100874(2020/07/02)}
}


@misc{CTT100826097,
  author = {伊藤浩之 and 道正志郎 and 石原昇 and 益一哉},
  title = {静電容量検出回路},
  howpublished = {登録特許},
  year = 2022,
  month  = {},
  note   = {特願2018-147146(2018/08/03), 特開2020-020769(2020/02/06), 特許第7161178号(2022/10/18)}
}


@misc{CTT100820740,
  author = {益一哉 and 町田克之 and 山根大輔 and 伊藤浩之 and 佐布　晃昭　 and 小西　敏文　 and 飯田　慎一　},
  title = {微細素子},
  howpublished = {登録特許},
  year = 2022,
  month  = {},
  note   = {特願2018-102096(2018/05/29), 特開2019-207133(2019/12/05), 特許第7002732号(2022/01/05)}
}


@misc{CTT100814171,
  author = {石原昇 and 伊藤浩之 and 道正志郎 and 益一哉},
  title = {無線センサおよびセンサネットワークシステム},
  howpublished = {公開特許},
  year = 2019,
  month  = {},
  note   = {特願2018-034546(2018/02/28), 特開2019-149090(2019/09/05)}
}