@book{CTT100758670,
  author = {Wan-Ting Chiu and Byung-Hoon Woo and Mitsuo Sano and Tso-Fu Mark Chang and Chun-Yi Chen and Tomoko Hashimoto and Hiromichi Kurosu and Masato Sone.},
  title = {Highly Reliable Metallization on Polymer and Their Fundamental Characteristics toward Wearable Devices Applications},
  publisher = {IFSA Publishing},
  year = 2018,
}

@article{CTT100772684,
  author = {Wan-Ting Chiu and Chun-Yi Chen and Tso-Fu Mark Chang and Tomoko Hashimoto and Hiromichi Kurosu and Masato Sone},
  title = {Ni-P and TiO2 Codeposition on Silk Textile via Supercritical CO2 Promoted Electroless Plating for Flexible and Wearable Photocatalytic Devices},
  journal = {Electrochemica Acta},
  year = 2018,
}

@article{CTT100766193,
  author = {Keisuke Asano and Hao-Chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Promoted bending strength in micro-cantilevers composed of nanograined gold toward MEMS applications},
  journal = {Microelectronic Engineering},
  year = 2018,
}

@article{CTT100763337,
  author = {Yi-Hsuan Chiu and Ting-Hsuan Lai and Chun-Yi Chen and Ping-Yen Hsieh and Kazunari Ozasa and Mitsuo Niinomi and Kiyoshi Okada and Tso-Fu Mark Chang and Nobuhiro Matsushita and Masato Sone and Yung-Jung Hsu},
  title = {Fully-Depleted Ti-Nb-Ta-Zr-O Nanotubes: Interfacial Charge Dynamics and Solar Hydrogen Production},
  journal = {ACS Applied Materials & Interfaces},
  year = 2018,
}

@article{CTT100756750,
  author = {Minami Teranishi and Chun-Yi Chen and Tso-Fu Mark Chang and Toshifumi Konishi and Katsuyuki Machida and Daisuke Yamane and Kazuya Masu and Masato Sone},
  title = {Enhancement in Structure Stability of Gold Micro-Cantilever by Constrainted Fixed-End in MEMS devices},
  journal = {Microelectronic Engineering},
  year = 2018,
}

@article{CTT100766253,
  author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Shin-ichi Iida and Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Hiroyuki Ito and Shiro Dosho and Noboru Ishihara and Masato Sone and Katsuyuki Machida and Kazuya Masu},
  title = {Temperature Characteristics of MEMS Inertial Sensor Fabricated by Gold Multi-Layer Metal Technology},
  journal = {},
  year = 2018,
}

@article{CTT100759309,
  author = {Wan-Ting Chiu and Chun-Yi Chen and Tso-Fu Mark Chang and Yuma Tahara and Tomoko Hashimoto and Hiromichi Kurosu and Masato Sone},
  title = {Platinum Coating on Silk by a Supercritical CO2 Promoted Metallization Technique for Applications of Wearable Devices},
  journal = {Surface & Coating Technology},
  year = 2018,
}

@article{CTT100759221,
  author = {Hao-Chun Tang and Ken Hashigata and Tso-Fu Mark Chang and Chun-Yi Chen and Takashi Nagoshi and Toshifumi Konishi and Daisuke Yamane and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Sample size effect on micro-mechanical properties of gold electroplated with dense carbon dioxide},
  journal = {Surface and Coatings Technology},
  year = 2018,
}

@article{CTT100758009,
  author = {Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Au-Cu Alloys Prepared by Pulse Electrodeposition toward Applications as Movable Micro-Components in Electronic Devices},
  journal = {Journal of The Electrochemical Society},
  year = 2018,
}

@inproceedings{CTT100772111,
  author = {Ken Hashigata and Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone.},
  title = {Electrodeposition of Gold on Titanium and Bending Test of Au-Ti Bi-Layered Micro-Cantilever},
  booktitle = {IUMRS-ICA 2018},
  year = 2018,
}

@inproceedings{CTT100772110,
  author = {Keisuke Asano and Hao-Chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone.},
  title = {Mechanical Characterization of Constant Current Electroplated Au-Cu Alloy Micro-Cantilever},
  booktitle = {IUMRS-ICA 2018},
  year = 2018,
}

@inproceedings{CTT100786703,
  author = {Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Solid Solution Strengthening of Gold Based Materials  for MEMS Applications},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100771788,
  author = {Yi-Hsuan Chiu and Ting-Hsuan Lai and Chun-Yi Chen and Ping-Yen Hsief and Tso-Fu Mark Chang and Nobuhiro Matsushita and Masato Sone and Yung-Jung Hsu},
  title = {Anodization of Ti-Nb-Ta-Zr-O Mixed-oxides Nanotubes Array for Photoelectrochemical Water Splitting},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100770653,
  author = {Tso-Fu Mark Chang and Wei-Hao Lin and Yung-Jung Hsu and Chun-Yi Chen and Masato Sone},
  title = {Cathodic Deposition of Metal Oxide Photocatalysts under High-Pressure Environment},
  booktitle = {Taiwan-Japan-US Joint Workshop on Energy Materials and Sustainable Development},
  year = 2018,
}

@inproceedings{CTT100770652,
  author = {Wan-Ting Chiu and Yuma Tahara and Chun-Yi Chen and Tso-Fu Mark Chang and Tomoko Hashimoto and Hiromichi Kurosu and Masato Sone},
  title = {ZnO/Au Layered Silk Prepared by Supercritical CO2 Promoted Electrodeposition toward Applications in Flexible Electronic Device},
  booktitle = {Taiwan-Japan-US Joint Workshop on Energy Materials and Sustainable Development},
  year = 2018,
}

@inproceedings{CTT100769746,
  author = {Wan-Ting Chiu and Chun-Yi Chen and Tso-Fu Mark Chang and Tomoko Hashimoto and Hiromichi Kurosu and Masato Sone},
  title = {Silk/Ni-P/TiO2 Composite Material Prepared by Supercritical CO2 Promoted Electroless Plating for Flexible Photocatalytic Device Applications},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769744,
  author = {Takahiro Yamamoto and Kengo Igawa and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshi and Osamu Kudo and Ryu Maeda and Masato Sone},
  title = {Micro-Mechanical Properties of Defect-Free Nickel Electrodeposited at a High Growth Rate toward MEMS Devices},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769742,
  author = {Hitomi Watanabe and Takuma Suzuki and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Effects of Ti/Au Layered Structure on Temperature Dependence of Micro-Cantilever Structure Stability},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769741,
  author = {Takahiro Yamamoto and Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Mechanical Property and Thermal Stability of Electrodeposited Au-Cu Alloys  for Reliability of MEMS Devices},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769740,
  author = {Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Takashi Nagoshib and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {High Strength Electrodeposited Gold-Copper Alloys for MEMS Devices},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769739,
  author = {Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Young’s Modulus of Ti/Au Micro-Cantilever by Resonance Frequency Method toward Au-Based MEMS Device},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769738,
  author = {Ken Hashigata and Hao-chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Mechanical Strength Enhancement of Ti/Au Layered Structure Evaluated by Micro-Bending Test},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769737,
  author = {Keisuke Asano and Hao-chun Tang and Chun-Yi Chen and Takashi Nagoshi and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Electrodeposited Au-Cu Alloy with High Yield Stress Evaluated by Micro-Bending Test},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769736,
  author = {Kyotaro Nitta and Koichiro Tachibana and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Cu-Alloying Effect on Structure Stability of Au Micro-Cantilever},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100769735,
  author = {Koichiro Tachibana and Chun-Yi Chen and Tso-Fu Mark Chang and Kyotaro Nitta and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Reliability Characteristics of Ti/Au Micro-Cantilever by Long-Term Vibration Test},
  booktitle = {44rd International Conference on Micro & Nano Engineering (MNE2018)},
  year = 2018,
}

@inproceedings{CTT100772182,
  author = {Tso-Fu Mark Chang and Hao-chun Tang and Kyotaro Nitta and Chun-Yi Chen and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Electrodeposition of High Strength Au-Cu Alloys for MEMS Device},
  booktitle = {2018 International Conference on Solid State Devices and Materials (SSDM2018)},
  year = 2018,
}

@inproceedings{CTT100772124,
  author = {Masato Sone and Hideaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroshi Toshiyoshi and Hiroyuki Ito and Kazuya Masu},
  title = {EFFECTIVE YOUNG’S MODULUS EVALUATION OF TI/AU MICRO STRUCTURES FOR MEMS ACCELEROMETER},
  booktitle = {8th research workshop "NEW METHODS OF DAMAGE AND FAILURE ANALYSIS OF STRUCTURAL PARTS"},
  year = 2018,
}

@inproceedings{CTT100771791,
  author = {中島 英亮 and Tso-Fu Mark Chang and Chun-Yi Chen and 山根 大輔 and 小西 敏文 and 町田 克之 and 年吉 洋 and 益 一哉 and 曽根 正人},
  title = {MEMS加速度センサに向けた金めっき微小カンチレバーのヤング率 に関する検討},
  booktitle = {第79回応用物理学会秋季学術講演会},
  year = 2018,
}

@inproceedings{CTT100768308,
  author = {HIdeaki Nakajima and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and HIroshi Toshiyoshi and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {A Study on Effective Young’s Modulus of Micro-Cantilevers Fabricated by Au Electroplating},
  booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan},
  year = 2018,
}

@inproceedings{CTT100760940,
  author = {Ken Hashigata and Haochun Tang and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {The effect of acid pre-treatment on electroplating of gold on titanium substrate},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100768307,
  author = {Kyotaro Nitta and Koichiro Tachibana and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Reliability Evaluation of Au-Cu Microcantilever by Long-Term Vibration Test toward MEMS Components},
  booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan},
  year = 2018,
}

@inproceedings{CTT100768386,
  author = {Chun-Yi Chen and Hao-Chun Tang and Tso-Fu Mark Chang and Takashi Nagoshi and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Ultra-high Strength in Electroplated Nanocrystalline Au-Cu Alloys Evaluated by Micro-Compression Tests for MEMS Devices},
  booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan},
  year = 2018,
}

@inproceedings{CTT100768387,
  author = {Koichiro Tachibana and Chun-Yi Chen and Tso-Fu Mark Chang and Kyoutarou Nitta and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Hiroyuki Ito and Kazuya Masu and Masato Sone},
  title = {Structure stability of Ti/Au micro-cantolever evaluated by long-term vibration test},
  booktitle = {Nano Engineering and Microsystem Technology Conference, Taiwan},
  year = 2018,
}

@inproceedings{CTT100768452,
  author = {Ping-Yen Hsieh and Yung-Jung Hsu and Chun-Yi Chen and Tso-Fu Mark Chang and Masato Sone},
  title = {Applications In2S3-TiO2 as Photoelectrochemical Sensor for Glutathione Detection},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100758671,
  author = {Kyoutarou Nitta and Koichiro Tachibana and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Structure Stability of Electrodeposited Au-Cu Alloy Micro-Cantilever Evaluated By Long-Term Vibration Test for Applications As Movable Components in MEMS Devices},
  booktitle = {233rd ECS Meeting},
  year = 2018,
}

@inproceedings{CTT100826577,
  author = {Wan-Ting Chiu and Chun-Yi Chen and Tso-Fu Mark Chang and Tomoko Hashimoto and Hiromichi Kurosu and Masato Sone},
  title = {Co-Deposition of Ni-P and TiO2 on Silk Textile by Supercritical CO2 Promoted Electroless Plating for Gas Sensor Applications},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100758521,
  author = {Haochun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Pulse Current Electrodeposition of Ultrahigh Strength of Nanocrystalline Au-Cu Alloys},
  booktitle = {22nd Topical Meeting of the International Society of Electrochemistry},
  year = 2018,
}

@inproceedings{CTT100758272,
  author = {Takahiro Yamamoto and Chun-Yi Chen and Tso-Fu Mark Chang and Osamu Kudo and Ryu Maeda and Masato Sone},
  title = {Effects of Current Density on Mechanical Properties of Electroplated Nickel with High Speed Sulfamate Bath},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100758271,
  author = {Ken Hashigata and Hao-Chun Tang and Tso-Fu Mark Chang and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Electroplating of Gold on Titanium Substrate: Method to Deposit Defect-Free Film},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100758208,
  author = {Yi-Hsuan Chiu and Chun-Yi Chen and Kazunari Ozasa and Mitsuo Niinomi and Kiyoshi Okada and Tso-Fu Mark Chang and Nobuhiro Matsushita and Yung-Jung Hsu and Masato Sone},
  title = {Anodization of Ti-Nb-Ta-Zr-O Mixed-oxides Nanotube Arrays: A Promising Alternative Photoelectrode for Solar Conversion},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100758207,
  author = {Tso-Fu Mark Chang and Yi-Hsuan Chiu and Chun-Yi Chen and Yung-Jung Hsu and Masato Sone},
  title = {Hydro-Baric Effect on Cathodic Deposition of Titanium Dioxide and Tin Dioxide},
  booktitle = {22nd Topical Meeting of the International Society of Electrochemistry},
  year = 2018,
}

@inproceedings{CTT100758205,
  author = {Wan-Ting Chiu and Chun-Yi Chen and Tso-Fu Mark Chang and Tomoko Hashimoto and Hiromichi Kurosu and Masato Sone},
  title = {Co-deposition of Ni-P and P25 on Silk Textile by Supercritical CO2 Promoted Electroless Plating for Flexible Photocatalyst Applications},
  booktitle = {22nd Topical Meeting of the International Society of Electrochemistry},
  year = 2018,
}

@inproceedings{CTT100758968,
  author = {中島英亮 and Chun-Yi Chen and Tso-Fu Mark Chang and ⼭根⼤輔 and 小西敏文 and 町⽥ 克之 and 年吉洋 and 益 ⼀哉 and 曽根 正⼈},
  title = {電解めっき法によるTi/Au微⼩カンチレバーのヤング率評価},
  booktitle = {応用物理学会第65回春季講演会},
  year = 2018,
}

@inproceedings{CTT100758966,
  author = {浅野 啓介 and TangHao-Chun and Chun-Yi Chen and 名越 貴志 and Tso-Fu Mark Chang and ⼭根⼤輔 and 小西敏文 and 町⽥ 克之 and 益 ⼀哉 and 曽根 正⼈},
  title = {電析制御による微⼩⾦カンチレバーの曲げ特性の改善},
  booktitle = {応用物理学会第65回春季講演会},
  year = 2018,
}

@inproceedings{CTT100760803,
  author = {小西 敏文 and 山根 大輔 and 佐布 晃昭 and 陳 君怡 and Chang Tso-Fu Mark and 伊藤 浩之 and 道正 志郎 and 石原 昇 and 曽根 正人 and 町田 克之 and 益 一哉 and 飯田 慎一},
  title = {積層メタル技術を用いたMEMS慣性センサの封止環境における温度依存性},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100758969,
  author = {TangHao-Chun and Chun-Yi Chen and Tso-Fu Mark Chang and ⼭根⼤輔 and 小西敏文 and 町⽥ 克之 and 益 ⼀哉 and 曽根 正⼈},
  title = {電解めっき法によるMEMS⽤⾦銅合⾦の作製及び機械的特性評価},
  booktitle = {応用物理学会第65回春季講演会},
  year = 2018,
}

@inproceedings{CTT100758967,
  author = {新⽥ 京太朗 and 橘 航⼀朗 and TangHao-Chun and Chun-Yi Chen and Tso-Fu Mark Chang and ⼭根 ⼤輔 and 小西敏文 and 町⽥ 克之 and 益 ⼀哉 and 曽根 正⼈},
  title = {⻑期振動試験によるAu-Cu合⾦微⼩カンチレバーの構造安定性},
  booktitle = {応用物理学会第65回春季講演会},
  year = 2018,
}

@inproceedings{CTT100766637,
  author = {Ken Hashigata and Hao-Chun Tang and Chun-Yi Chen and Tso-Fu Mark Chang and Daisuke Yamane and Toshifumi Konishi and Katsuyuki Machida and Kazuya Masu and Masato Sone},
  title = {Enhanced Mechanical Strength of Ti-Au Bi-Layered Micro-Cantilever for MEMS Accelerometers},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100751727,
  author = {Wan-Ting Chiu and Yuma Tahara and Chun-Yi Chen and Tso-Fu Mark Chang and Tomoko Hashimoto and Hiromichi Kurosu and Masato Sone},
  title = {ZnO Synthesis on the Au Metallized Silk Textile for Flexible Photocatalyst Application},
  booktitle = {},
  year = 2018,
}

@inproceedings{CTT100758971,
  author = {⼭本 貴⼤ and 井川 健吾 and Chun-Yi Chen and Tso-Fu Mark Chang and 名越 貴志 and 工藤 緯 and 前田 龍 and 曽根正人},
  title = {スルファミン酸ハイスピード浴を⽤いて電気めっきしたニッケル膜の機械的特性に及ぼす電流密度の影響},
  booktitle = {応用物理学会第65回春季講演会},
  year = 2018,
}

@inproceedings{CTT100758970,
  author = {⽥岡 光⽉ and ⽥邊 万奈 and Chen Chun-Yi and Chang Tso-Fu Mark and 曽根 正⼈},
  title = {電解スズめっきの機械的特性におけるSnO2の影響},
  booktitle = {応用物理学会第65回春季講演会},
  year = 2018,
}

@misc{CTT100835046,
  author = {曽根正人 and Tso-Fu Mark Chang and 陳君怡 and 町田克之 and 山根大輔 and 伊藤浩之 and 益一哉},
  title = {貴金属またはその合金の微細結晶組織を有する金属材料},
  howpublished = {公開特許},
  year = 2020,
  month  = {},
  note   = {特願2018-239826(2018/12/21), 特開2020-100874(2020/07/02)}
}


@misc{CTT100787104,
  author = {益一哉 and 曽根正人 and Tso-Fu Mark Chang and 陳君怡 and 山根大輔 and 小西　敏文 and 佐布　晃昭　 and 町田　克之},
  title = {微細素子およびその製造方法},
  howpublished = {登録特許},
  year = 2021,
  month  = {},
  note   = {特願2017-055730(2017/03/22), 特開2018-158394(2018/10/11), 特許第6818299号(2021/01/05)}
}