@inproceedings{CTT100891355,
  author = {Terumichi Hayashi and Yuki Taoka and Shigeki Saito},
  title = {Development of a Compliant Bipolar Electrostatic Chuck Having 3D-Printed Elastically-Deformable Beams for Handling Large Film},
  booktitle = {},
  year = 2019,
}

@inproceedings{CTT100794000,
  author = {林輝道 and HEMTHAVYPASOMPHONE and 高橋邦夫 and 齋藤滋規},
  title = {集合梁構造により表面柔軟性を有する双極型静電吸着デザイスの大面積化},
  booktitle = {2019年度精密工学会春季大会講演論文集},
  year = 2019,
}