@book{CTT100836448, author = {白石貴久 and 舟窪浩}, title = {水熱法による圧電セラミックスの製造}, publisher = {株式会社技術情報協会}, year = 2020, } @article{CTT100849036, author = {Yoshiomi Hiranaga and Takanori Mimura and Takao Shimizu and Hiroshi Funakubo and Yasuo Cho}, title = {Local C-V mapping for ferroelectrics using scanning nonlinear dielectric microscopy}, journal = {J. Appl. Phys.}, year = 2020, } @article{CTT100849033, author = {Atsuo Katagiri and Mutsuo Uehara and Mao Kurokawa and Kensuke Akiyama and Takao Shimizu and Masaaki Matsushima and Hiroshi Uchida and Yoshisato Kimura and Hiroshi Funakubo}, title = {Composition Dependence of Crystal Structures and Electrical Properties of Ca-Mg-Si Films Prepared by Sputtering}, journal = {Journal of ELECTRONIC MATERIALS}, year = 2020, } @article{CTT100849025, author = {Kyle Kelley and Linglong Li and Yao Ren and Yoshitaka Ehara and Hiroshi Funakubo and Suhas Somnath and Stephen Jesse and Ye Cao and Ramakrishnan Kannan and Rama Vasudevan and Sergei Kalinin}, title = {Tensor factorization for elucidating mechanisms of piezoresponse relaxation via dynamic piezoresponse force spectroscopy}, journal = {npj Computational Materials}, year = 2020, } @article{CTT100849031, author = {Shinnosuke Yasuoka and Takao Shimizu and Masato Uehara and Hiroshi Yamada and Morito Akiyama and Yoshiomi Hiranaga and Yasuo Cho and Hiroshi Funakubo}, title = {Effects of deposition conditions on the ferroelectric properties of (Al1-xScx)N thin films}, journal = {J. Appl. Phys.}, year = 2020, } @article{CTT100849032, author = {Akinori Tateyama and Yoshiharu Ito and Yoshiko Nakamura and Takao Shimizu and Yuichiro Orino and Minoru Kurosawa and Hiroshi Uchida and Takahisa Shiraishi and Takanori Kiguchi and Toyohiko J. Konno and Takeshi Yoshimura and Hiroshi Funakubo}, title = {Good piezoelectricity of self-polarized thick epitaxial (K,Na)NbO3 films grown below the Curie temperature (240°C) using a hydrothermal method}, journal = {Appl. Phys. Lett.}, year = 2020, } @article{CTT100849034, author = {Masanori Kodera and Takao Shimizu and Hiroshi Funakubo}, title = {Epitaxial Crystal Growth of Bismuth Silicate Driven by Fluorite-Like Layers}, journal = {Cryst. Growth Des.}, year = 2020, } @article{CTT100849008, author = {Reijiro Shimura and Takanori Mimura and Takao Shimizu and Yoshitomo Tanaka and Yukari Inoue and Hiroshi Funakubo}, title = {Preparation of near-1-μm-thick {100}-oriented epitaxial Y-doped HfO2 ferroelectric films on (100)Si substrates by an RF magnetron sputtering method}, journal = {J.Ceram. Soc. Jpn}, year = 2020, } @article{CTT100849019, author = {Yu Huang and Yoshiharu Ito and Akinori Tateyama and Minoru Kurosawa and Hiroshi Funakubo}, title = {Crystal structure and properties of epitaxial (1-x)(Bi0.5Na0.5)TiO3-x(Bi0.5K0.5)TiO3 films grown by hydrothermal method}, journal = {Jpn. J. Appl. Phys.}, year = 2020, } @article{CTT100849011, author = {Akinori Tateyama and Yoshiharu Ito and Takao Shimizu and Yuichiro Orino and Minoru Kurosawa and Takeshi Yoshimura and Hiroshi Funakubo}, title = {Composition dependency of direct and inverse transverse piezoelectric property in self-polarized epitaxial (KxNa1-x)NbO3 films grown by hydrothermal method}, journal = {Jpn. J. Appl. Phys.}, year = 2020, } @article{CTT100849010, author = {Hiroki Tanaka and Kiyoshi Uchiyama and Takao Shimizu and Hiroshi Funakubo}, title = {Optimization of deposition conditions of Y doped-SrZrO3 thin films fabricated by pulsed laser deposition}, journal = {J. Ceram. Soc. Jpn.}, year = 2020, } @article{CTT100849009, author = {Yoshiharu Ito and Akinori Tateyama and Yoshiko Nakamura and Takao Shimizu and Minoru Kurosawa and Hiroshi Uchida and Takahisa Shiraishi and Takanori Kiguchi and Toyohiko J. Konno and Mutsuo Ishikawa and Nobuhiro Kumada and Hiroshi Funakubo}, title = {High yield preparation of (100)c-oriented (K,Na)NbO3 thick films by hydrothermal method using amorphous niobium source}, journal = {J. Ceram. Soc. Jpn.}, year = 2020, } @article{CTT100846255, author = {Y. Shiotsu and S. Yamamoto and Y. Shuto and H. Funakubo and M. K. Kurosawa and S. Sugahara}, title = {Modeling and Design of a New Piezoelectronic Transistor for Ultralow-Voltage High-Speed Integrated Circuits}, journal = {IEEE Trans. on Electron Devices}, year = 2020, } @article{CTT100849035, author = {Rama K. Vasudevan and Kyle P. Kelley and Eugene Eliseev and Stephen Jesse and Hiroshi Funakubo and Anna Morozovska and Sergei V. Kalinin}, title = {Bayesian inference in band excitation Scanning Probe Microscopy for optimal dynamic model selection in imaging}, journal = {J. Appl. Phys.}, year = 2020, } @article{CTT100849022, author = {Kyle P. Kelley and Yao Ren and Anna N. Morozovska and Eugene A. Eliseev and Yoshitaka Ehara and Hiroshi Funakubo and Thierry Giamarchi and Nina Balke and Rama K. Vasudevan and Ye Cao and Stephen Jesse and Sergei V. Kalinin}, title = {Dynamic Manipulation in Piezoresponse Force Microscopy: Creating Nonequilibrium Phases with Large Electromechanical Response}, journal = {ACS Nano 2020}, year = 2020, } @article{CTT100849024, author = {Hiroshi Uchida and Masaki Okura and Yoshiharu Ito and Takahisa Shiraishi and Takanori Kiguchi and Toyohiko J. Konno and Hiroshi Funakubo}, title = {Rapid deposition of (K,Na)NbO3 thick films using microwave-assisted hydrothermal technique}, journal = {Jpn. J. Appl. Phys.}, year = 2020, } @article{CTT100849014, author = {Yoshitaka Ehara and Takaaki Nakashima and Daichi Ichinose and Takao Shimizu and Tomoaki Yamada and Ken Nishida and Hiroshi Funakubo}, title = {Temperature dependence on the domain structure of epitaxial PbTiO3 films grown on single-crystal substrates with different lattice parameters}, journal = {Jpn. J. Appl. Phys.}, year = 2020, } @article{CTT100849006, author = {Kazuki Okamoto and Tomoaki Yamada and Kentaro Nakamura and Hidenori Takana and Osami Sakata and Mick Phillips and Takanori Kiguchi and Masahito Yoshino and Hiroshi Funakubo and Takanori Nagasaki}, title = {Enhanced intrinsic piezoelectric response in (001)-epitaxial single c-domain Pb(Zr,Ti)O3 nanorods}, journal = {Appl. Phys. Lett.}, year = 2020, } @article{CTT100843361, author = {Keisuke Yazawa and Benjamin Ducharne and Hiroshi Uchida and Hiroshi Funakubo and John E. Blendell}, title = {Barkhausen Noise Analysis of Thin Film Ferroelectrics}, journal = {Appl. Phys. Lett.}, year = 2020, } @article{CTT100849023, author = {Mitsumasa Nakajima and Takao Shimizu and Hiroshi Nakaki and Tomoaki Yamada and Ayumi Wada and Takaaki Nakashima and Yoshitaka Ehara and Hiroshi Funakubo}, title = {Large electromechanical responses driven by electrically induced dense ferroelastic domains:beyond morphotropic phase boundary}, journal = {ACS Appl. Electron. Mater. 2020}, year = 2020, } @article{CTT100843349, author = {Takahisa Shiraishi and Yuta Muto and Yoshiharu Ito and Takanori Kiguchi and Kazuhisa Sato and Masahiko Nishijima and Hidehiro Yasuda and Hiroshi Funakubo and Toyohiko J. Konno}, title = {Structural and electrical characterization of hydrothermally-deposited piezoelectric (K,Na)(Nb,Ta)O3 thick films}, journal = {J. Mater. Sci.}, year = 2020, } @article{CTT100843352, author = {Masanori Kodera and Ayako Taguchi and Takao Shimizu and Hiroki Moriwake and Hiroshi Funakubo}, title = {Fabrication and characterization of ReO3-type dielectric films}, journal = {J. Mater. Chem. C}, year = 2020, } @article{CTT100821137, author = {Takanori Mimura and Takao Shimizu and Yoshio Katsuya and Osami Sakata and Hiroshi Funakubo}, title = {Thickness- and orientation- dependences of Curie temperature in ferroelectric epitaxial Y doped HfO2 films}, journal = {Jpn. J. Appl. Phys.}, year = 2020, } @article{CTT100821136, author = {Takanori Mimura and Takao Shimizu and Hiroshi Uchida and Hiroshi Funakubo}, title = {Room-temperature deposition of ferroelectric HfO2-based films by the sputtering metho}, journal = {Appl. Phys. Lett.}, year = 2020, } @article{CTT100821134, author = {Yoshiyuki Seki and Yutaka Sawada and Hiroshi Funakubo and Kazuhisa Kawano and Noriaki Oshima}, title = {Preparation of iridium metal films by spray chemical vapor deposition}, journal = {MRS Advances}, year = 2020, } @article{CTT100822933, author = {Joel Molina-Reyes and Takuya Hoshii and Shun-Ichiro Ohmi and Hiroshi Funakubo and Atsushi Hori and Ichiro Fujiwara and Hitoshi Wakabayashi and Kazuo Tsutsui and Kuniyuki Kakushima}, title = {NiSi2 as a Bottom Electrode for Enhanced Endurance of Ferroelectric Y-doped HfO2 Thin Films}, journal = {Japanese Journal of Applied Physics}, year = 2020, } @article{CTT100821138, author = {Joel Molina-Reyes and Takuya Hoshii and Shun-Ichiro Ohmi and Hiroshi Funakubo and Atsushi Hori and Ichiro Fujiwara and Hitoshi Wakabayashi and Kazuo Tsutsui and Kuniyuki Kakushima}, title = {NiSi2 as a Bottom Electrode for Enhanced Endurance of Ferroelectric Y-doped HfO2 Thin Films}, journal = {Jpn. J. Appl. Phys.}, year = 2020, } @article{CTT100821132, author = {Atsuo Katagiri and Shota Ogawa and Takao Shimizu and Masaaki Matsushima and Kensuke Akiyama and Hiroshi Uchida and Hiroshi Funakubo}, title = {Epitaxial growth of Mg2Si films on (111) Si substrates covered with epitaxial SiC layers}, journal = {Jpn. J. Appl. Phys.}, year = 2020, } @article{CTT100820053, author = {Kodai Aoyama and Takao Shimizu and Hideto Kuramochi and Masami Mesuda and Ryo Akiike and Keisuke Ide and Takayoshi Katase and Toshio Kamiya and Yoshisato Kimura and Hiroshi Funakubo}, title = {Thermoelectric (BaxSr1–x)Si2 films prepared by sputtering method over the barium solubility limit}, journal = {Jpn. J. Appl. Phys.}, year = 2020, } @article{CTT100820055, author = {Kodai Aoyama and Takao Shimizu and Hideto Kuramochi and Masami Mesuda and Ryo Akiike and Keisuke Ide and Takayoshi Katase and Toshio Kamiya and Yoshisato Kimura and Hiroshi Funakubo}, title = {Fabrication and characterization of CaxSr1-x)Si2 films prepared by co-sputtering method}, journal = {MRS Advances}, year = 2020, } @inproceedings{CTT100853321, author = {清水荘雄 and 江原祥隆 and 三村和仙 and 安井伸太郎 and 山田智明 and 今井康彦 and 坂田修身 and 舟窪浩}, title = {時間分解XRD測定による周期電界下における菱面体PZTの(111)/(-111)ドメイン構造の観察}, booktitle = {}, year = 2020, } @inproceedings{CTT100853272, author = {白石貴久 and 佐野真太郎 and 伊東良晴 and 舘山明紀 and 内田寛 and 木口賢紀 and 舟窪浩 and 今野豊彦}, title = {水熱法により作製した(K,Na)NbO3基膜の結晶構造および電気特性の評価}, booktitle = {}, year = 2020, } @inproceedings{CTT100853271, author = {大倉雅貴 and 伊東良晴 and 白石貴久 and 木口賢紀 and 今野豊彦 and 舟窪浩 and 内田寛}, title = {マイクロ波加熱式水熱プロセスにおけるニオブ酸カリウム基膜の堆積挙動の解析}, booktitle = {}, year = 2020, } @inproceedings{CTT100853270, author = {石濱圭佑 and 舘山明紀 and 佐藤祐介 and 山岡和希子 and 石田未来 and 清水荘雄 and 舟窪浩}, title = {正方晶 (1-x)(Bi, Na)TiO3-xBaTiO3膜の評価}, booktitle = {}, year = 2020, } @inproceedings{CTT100853267, author = {清水荘雄 and 田代裕貴 and 三村和仙 and 舟窪浩}, title = {HfO2基材料における強誘電相生成機構}, booktitle = {}, year = 2020, } @inproceedings{CTT100842162, author = {Mutsuo Ishikawa and Ayaho Tsukamoto and Nao Saito and Shintaro Yasui and Marie Tabaru and HIROSHI FUNAKUBO and Minoru Kuribayashi Kurosawa}, title = {Evaluation of ultrasonic spray coating using high intensity and high frequency ultrasonic transducer}, booktitle = {Proceedings of Symposium on Ultrasonic Electronics}, year = 2020, } @inproceedings{CTT100853283, author = {吉澤宗眞 and 鈴木雅視 and 垣尾省司 and Yoshiharu Ito and Akinori Tateyama and HIROSHI FUNAKUBO and 若林剛}, title = {Evaluation of Electromechanical Coupling Coefficients of Hydrothermally Synthesized (K,Na)NbO3 Films}, booktitle = {}, year = 2020, } @inproceedings{CTT100853278, author = {大倉雅貴 and 伊東良晴 and 白石貴久 and 木口賢紀 and 今野豊彦 and 舟窪浩 and 内田寛}, title = {マイクロ波加熱式水熱合成によるニオブ酸カリウム膜堆積のプロセス低温化}, booktitle = {}, year = 2020, } @inproceedings{CTT100853256, author = {片桐淳生 and 上原睦雄 and 黒川満央 and 秋山賢輔 and 松島正明 and 内田寛 and 木村好里 and 舟窪浩}, title = {Ca- Mg-Si三元系熱電材料におけるSi含有量変化に伴う導電型の制御}, booktitle = {}, year = 2020, } @inproceedings{CTT100852997, author = {小寺正徳 and 舟窪浩 and 田口綾子 and 森分博紀 and 清水荘雄}, title = {ReO3構造酸フッ化物薄膜の誘電体応⽤可能性}, booktitle = {}, year = 2020, } @inproceedings{CTT100852998, author = {吉澤宗眞 and 鈴木雅視 and 垣尾省司 and 伊東良晴 and 舘山明紀 and 舟窪浩 and 若林剛}, title = {水熱合成(K,Na)NbO3膜の電気機械結合係数の評価}, booktitle = {}, year = 2020, } @inproceedings{CTT100853000, author = {森川友秀 and 小寺正徳 and 江原祥隆 and 清水荘雄 and 舟窪浩}, title = {歪フリーなPb(Zrx,Ti1-x)O3薄膜の作製法の検討}, booktitle = {}, year = 2020, } @inproceedings{CTT100853001, author = {舘山明紀 and 伊東良晴 and 清水荘雄 and 折野裕一郎 and 黒澤実 and 舟窪浩}, title = {縦振動を用いた薄膜の正逆圧電応答同時評価法の提案}, booktitle = {}, year = 2020, } @inproceedings{CTT100853246, author = {安岡慎之介 and 清水荘雄 and 上原雅人 and 山田浩志 and 秋山守人 and 舟窪浩}, title = {スパッタリング法で室温合成した(Al1-xScx)N膜の強誘電性評価}, booktitle = {}, year = 2020, } @inproceedings{CTT100853248, author = {窪田るりか and 伊東良晴 and 黒澤実 and 舟窪浩}, title = {化学気相堆積法及び水熱合成法を用いた(Bi,K)TiO3薄膜作製の検討}, booktitle = {}, year = 2020, } @inproceedings{CTT100853250, author = {伊東良晴 and 舘山明紀 and 黄宇 and 窪田るりか and 黒澤実 and 舟窪浩}, title = {水熱合成法を用いた(Bi,K)TiO3薄膜の低温製膜}, booktitle = {}, year = 2020, } @inproceedings{CTT100853255, author = {志村礼司郎 and 三村和仙 and 舘山明紀 and 清水荘雄 and 舟窪浩}, title = {スパッタリング法によるHfO2基強誘電体厚膜のシリコン基板上への室温製膜とその電気特性および圧電特性評価}, booktitle = {}, year = 2020, } @inproceedings{CTT100852995, author = {Kazuto Mizutani and Yu Wei Lin and Takuya Hoshii and Hiroshi Funakubo and Hitoshi Wakabayashi and Kazuto Tsutsui and Kuniyuki Kakushima}, title = {Formation of Ferroelectric Y-doped HfO2 though Atomic Layer Deposition and Low Temperature Post Annealing}, booktitle = {}, year = 2020, } @inproceedings{CTT100852845, author = {Hiroshi Funakubo and Takanori Mimura and Takao Shimizu}, title = {High stability of Ferroelectric phase in Y-doped HfO2 films}, booktitle = {}, year = 2020, } @inproceedings{CTT100852844, author = {Hiroshi Funakubo}, title = {Domain structure change by applying electric field in dominantly in-plane-polarized (100)/(001)-oriented tetragonal Pb(Zr,Ti)O3 thin film}, booktitle = {}, year = 2020, } @inproceedings{CTT100853530, author = {大倉雅貴 and 伊東良晴 and 白石貴久 and 木口賢紀 and 今野豊彦 and 舟窪浩 and 内田寛}, title = {マイクロ波加熱式水熱合成プロセスによるニオブ酸カリウム基厚膜の高速堆積}, booktitle = {}, year = 2020, } @inproceedings{CTT100852900, author = {J. Molina and T. Mimura and Y. Nakamura and T. Shimizu and H. Funakubo and I. Fujiwara and T. Hoshii and S. Ohmi and A. Hori and H. Wakabayashi and K. Tsutsui and K. Kakushima}, title = {Interface engineering of BEOL compatible ferroelectric Y:HfO2 device for enhanced endurance}, booktitle = {}, year = 2020, } @inproceedings{CTT100852901, author = {安岡 慎之介 and 清水 荘雄 and 上原雅人 and 山田浩志 and 秋山守人 and 舟窪 浩}, title = {二次元スパッタリング法により作製した(Al1-xScx)N 薄膜の強誘電特性}, booktitle = {}, year = 2020, } @inproceedings{CTT100852902, author = {Yu Huang and Yoshiharu Ito and Akinori Tateyama and Minoru Kurosawa and Hiroshi Funakubo}, title = {Lead-free Potassium-Sodium-Bismuth Titanate Epitaxial Films Synthesized by Hydrothermal Method}, booktitle = {}, year = 2020, } @inproceedings{CTT100852990, author = {舘山明紀 and 伊東良晴 and 清水荘雄 and 黒澤実 and 折野裕一郎 and 吉村武 and 舟窪浩}, title = {水熱合成法で作製した自己分極(K,Na)NbO3 膜の正・逆圧電特性評価}, booktitle = {}, year = 2020, } @inproceedings{CTT100852992, author = {江原祥隆 and 一ノ瀬大地 and 中島崇明 and 清水荘雄 and 山田智明 and 舟窪浩 and 西田謙}, title = {格子定数の異なる単結晶基板上に作成したPbTiO3 エピタキシャル薄膜の構造変化}, booktitle = {}, year = 2020, } @inproceedings{CTT100828160, author = {石河睦生 and 塚本綾穂 and 斎藤直 and 田原麻梨江 and 舟窪浩 and 黒澤実}, title = {バイオプリンティングへの応用を目的とした高周波高出力超音波トランスデューサを用いた液滴の吐出とその評価}, booktitle = {}, year = 2020, } @inproceedings{CTT100821934, author = {伊東良晴 and 舘山明紀 and 清水荘雄 and 黒澤実 and 舟窪浩}, title = {水熱合成法を用いたエピタキシャル(Bi, K)TiO3薄膜の合成と評価}, booktitle = {}, year = 2020, } @inproceedings{CTT100821935, author = {大倉雅貴 and 内田寛 and 白石貴久 and 木口賢紀 and 今野豊彦 and 伊東良晴 and 舟窪浩}, title = {マイクロ波加熱式水熱合成によるニオブ酸カリウム配向体の堆積}, booktitle = {}, year = 2020, } @inproceedings{CTT100821936, author = {内田寛 and 大久保定晃 and 白石貴久 and 木口賢紀 and 今野豊彦 and 伊東良晴 and 舟窪浩}, title = {水熱合成由来ニオブ酸カリウム-ナトリウム材料における不純物の分析}, booktitle = {}, year = 2020, } @inproceedings{CTT100821937, author = {小寺正徳 and 田口綾子 and 清水荘雄 and 森分博紀 and 舟窪 浩}, title = {ReO3構造を有する酸フッ化物薄膜の誘電特性}, booktitle = {}, year = 2020, } @inproceedings{CTT100821816, author = {秋山賢輔 and 高橋亮 and 本泉佑 and 舟窪浩 and 入江寛}, title = {光触媒効果による水分解に向けたルチルTiO2とb-FeSi2との複合粒子合成}, booktitle = {}, year = 2020, } @inproceedings{CTT100821817, author = {安岡慎之介 and 清水荘雄 and 上原雅人 and 舟窪浩}, title = {(Al1-xScx)N薄膜の強誘電特性に及ぼす製膜条件の影響}, booktitle = {}, year = 2020, } @inproceedings{CTT100821818, author = {上原雅人 and 安岡慎之介 and 清水荘雄 and 山田浩志 and 秋山守人 and 舟窪浩}, title = {スパッタリング法で作製したGaNおよびSc添加GaN薄膜の強誘電性評価}, booktitle = {}, year = 2020, } @inproceedings{CTT100821819, author = {小寺正徳 and 清水荘雄 and 舟窪浩}, title = {Bi2SiO5エピタキシャル薄膜の結晶成長に関する検討}, booktitle = {}, year = 2020, } @inproceedings{CTT100821820, author = {江原祥隆 and 中島崇明 and 一ノ瀬大地 and 清水荘雄 and 西田謙 and 山田智明 and 舟窪浩}, title = {面内分極配向したPbTiO3薄膜のa1/a2ドメイン構造の膜厚依存}, booktitle = {}, year = 2020, } @inproceedings{CTT100821821, author = {大倉雅貴 and 伊東良晴 and 白石貴久 and 木口賢紀 and 今野豊彦 and 舟窪浩 and 内田寛}, title = {マイクロ波加熱式水熱合成プロセスによる(K,Na)NbO3厚膜の堆積}, booktitle = {}, year = 2020, } @inproceedings{CTT100821823, author = {舘山明紀 and 伊東良晴 and 清水荘雄 and 折野裕一郎 and 黒澤実 and 舟窪浩}, title = {水熱合成法で作製した(KxNa1-x)NbO3自己分極膜の縦振動を用いた正逆圧電応答の同時評価}, booktitle = {}, year = 2020, } @inproceedings{CTT100821824, author = {石濱圭佑 and 舘山明紀 and 清水荘雄 and 佐藤裕介 and 山岡和希子 and 石田未来 and 舟窪浩}, title = {PLD法で作製した正方晶(1-x)(Bi,Na)TiO3-xBaTiO3膜の評価}, booktitle = {}, year = 2020, } @inproceedings{CTT100821828, author = {三村和仙 and 清水荘雄 and 舟窪浩}, title = {エピタキシャルHfO2基膜を用いた直方晶相安定化の調査}, booktitle = {}, year = 2020, } @inproceedings{CTT100821832, author = {志村礼司郎 and 三村和仙 and 舘山明紀 and 清水荘雄 and 舟窪浩}, title = {スパッタリング法によるHfO2基強誘電体厚膜の室温製膜とその電気特性評価}, booktitle = {}, year = 2020, } @inproceedings{CTT100821815, author = {小寺正徳 and 舟窪浩 and 清水荘雄}, title = {Bi2SiO5エピタキシャル薄膜の作製と強誘電性}, booktitle = {}, year = 2020, } @inproceedings{CTT100821273, author = {舟窪浩 and 伊藤満 and 和田智志 and 大橋直樹 and 谷口博基 and 清水荘雄}, title = {パワーデバイスやIoT用途の誘電体材料の創出}, booktitle = {}, year = 2020, } @inproceedings{CTT100821814, author = {清水荘雄 and 三村和仙 and 舟窪浩}, title = {HfO2基強誘電体の相安定性と厚膜化}, booktitle = {}, year = 2020, } @inproceedings{CTT100821812, author = {石濱圭佑 and 舘山明紀 and 清水荘雄 and 佐藤裕介 and 山岡和季子 and 石田未来 and 舟窪浩}, title = {PLD法で作製した正方晶(1-x)(Bi,Na)TiO3-xBiTiO3膜の作製と評価}, booktitle = {}, year = 2020, } @inproceedings{CTT100821813, author = {田代裕貴 and 三村和仙 and 清水荘雄 and 勝矢良雄 and 坂田修身 and 木口賢紀 and 白石貴久 and 今野豊彦 and 舟窪浩}, title = {HfO2基薄膜のZr, Yドープによる結晶相変化と強誘電相の安定性}, booktitle = {}, year = 2020, } @inproceedings{CTT100809776, author = {青山航大 and 清水荘雄 and 倉持豪人 and 召田雅実 and 秋池良 and 井手啓介 and 片瀬貴義 and 神谷利夫 and 舟窪浩}, title = {二元同時スパッタ法で作製したAeSi2 膜(Ae= Ca, Sr, Ba)の構成相と電気特性}, booktitle = {}, year = 2020, } @inproceedings{CTT100821778, author = {井上英久 and 舘山明紀 and 清水荘雄 and 舟窪浩}, title = {MOCVD法で作製した組成相境界近傍組成を有するエピタキシャルPZT膜の結晶構造および圧電性評価}, booktitle = {}, year = 2020, } @inproceedings{CTT100821779, author = {安岡慎之介 and 清水荘雄 and 上原雅人 and 舟窪浩}, title = {二元同時スパッタリング法によるAl1-xScxN薄膜の作製と強誘電性評価}, booktitle = {}, year = 2020, } @misc{CTT100836410, author = {安岡慎之介 and 清水荘雄 and 舟窪浩}, title = {窒化物圧電体膜の微構造評価}, year = 2020, } @misc{CTT100836412, author = {舟窪浩}, title = {強誘電体膜のドメイン構造解析とその形成機構}, year = 2020, } @misc{CTT100836428, author = {井上英久 and 清水荘雄 and 舟窪浩}, title = {PZT膜の電圧印可による結晶構造変化}, year = 2020, } @misc{CTT100836434, author = {清水荘雄 and 舟窪浩}, title = {2相共存PZTにおける電場有機相転移の観察}, year = 2020, } @misc{CTT100836436, author = {清水荘雄 and 舟窪浩}, title = {新規非鉛圧電体の時間分解X線回折による電場応答の観察}, year = 2020, } @misc{CTT100836447, author = {三村和仙 and 志村礼司郎 and 舟窪浩 and 清水荘雄}, title = {HfO2およびZrO2基強誘電体膜の厚膜化と室温合成}, year = 2020, } @misc{CTT100900373, author = {舟窪浩 and 清水荘雄 and 安岡慎之介 and 上原 雅人 and 山田 浩志  and 秋山 守人}, title = {強誘電性薄膜、それを用いた電子素子および強誘電性薄膜の製造方法}, howpublished = {登録特許}, year = 2023, month = {}, note = {特願2021-567693(2020/12/25), 特許第7260863号(2023/04/11)} } @misc{CTT100877447, author = {舟窪浩 and 清水荘雄 and 青山航大 and 召田 雅実  and 秋池 良 }, title = {珪化物系合金薄膜及びその製造方法}, howpublished = {公開特許}, year = 2022, month = {}, note = {特願2020-157537(2020/09/18), 特開2022-051194(2022/03/31)} } @misc{CTT100869586, author = {舟窪浩 and 清水荘雄 and 三村和仙 and 中村 美子 and 志村 礼司郎 and 田代裕貴}, title = {強誘電性膜の製造方法、強誘電性膜、及びその用途}, howpublished = {公開特許}, year = 2020, month = {}, note = {PCT/JP2020/018031(2020/04/27), WO 2020/218617(2020/10/29)} } @misc{CTT100842087, author = {舟窪浩 and 森下 純平 and 佐藤 祐介}, title = {圧電薄膜、圧電薄膜素子、圧電アクチュエータ、圧電センサ、ヘッドアセンブリ、ヘッドスタックアセンブリ、ハードディスクドライブ、プリンタヘッド、及びインクジェットプリンタ装置}, howpublished = {公開特許}, year = 2020, month = {}, note = {特願2019-032998(2019/02/26), 特開2020-140975(2020/09/03)} } @misc{CTT100828296, author = {黒澤実 and 孔徳卿 and 石河 睦生 and 舟窪浩 and 伊東 良晴 and 舘山明紀}, title = {液中推進装置}, howpublished = {公開特許}, year = 2020, month = {}, note = {特願2018-163232(2018/08/31), 特開2020-032956(2020/03/05)} } @misc{CTT100828285, author = {舟窪浩 and 清水荘雄 and 三村和仙 and 志村 礼司郎 and 井上 ゆか梨 and 佐藤 祐介}, title = {強誘電性薄膜、強誘電性薄膜素子、圧電アクチュエータ、圧電センサ、ヘッドアセンブリ、ヘッドスタックアセンブリ、ハードディスクドライブ、プリンタヘッド、及びインクジェットプリンタ装置}, howpublished = {登録特許}, year = 2022, month = {}, note = {特願2018-163377(2018/08/31), 特開2020-033629(2020/03/05), 特許第7061752号(2022/04/21)} } @misc{CTT100753371, author = {清水荘雄 and 舟窪浩 and 片山きりは and 三村和仙}, title = {強誘電性薄膜、電子素子及び製造方法}, howpublished = {登録特許}, year = 2020, month = {}, note = {特願2016-545654(2015/08/28), 再表2016/031986(2017/06/15), 特許第6661197号(2020/02/14)} }