@book{CTT100846136, author = {Tso-Fu Mark Chang and Hideaki Nakajima and Chun-Yi Chen and Daisuke Yamane and Toshifumi Konishi and Hiroyuki Ito and Katsuyuki Machida and Kazuya Masu and Hiroshi Toshiyoshi and Masato Sone}, title = {Effective Young’s Modulus of Elelectrodeposited Gold for Design of MEMS Accelerometers}, publisher = {IFSA PUBLISHING, S.L.}, year = 2021, }