@article{CTT100855464, author = {Shinya Imai and Takuya Hamada and Masaya Hamada and Takanori Shirokura and Iriya Muneta and Kuniyuki Kakushima and Tetsuya Tatsumi and Shigetaka Tomiya and Kazuo Tsutsui and Hitoshi Wakabayashi}, title = {Importance of Crystallinity Improvement in MoS2 film just after MoS2-Compound Sputtering even followed by Post Sulfurization for Chip-Size Fabrication}, journal = {Japanese Journal of Applied Physics (JJAP) (SSDM特集号)}, year = 2021, } @inproceedings{CTT100877149, author = {Ryo Ono and Shinya Imai and Yuta Kusama and Takuya Hamada and Masaya Hamada and Iriya Muneta and Kuniyuki Kakushima and Kazuo Tsutsui and Nobuyuki Ikarashi and Hitoshi Wakabayashi}, title = {Growth Mechanism of PVD MoS2 Film from Sub-Monolayer Region}, booktitle = {}, year = 2021, }