@misc{CTT100884604, author = {大見俊一郎}, title = {強誘電性薄膜の形成方法、それを備える半導体装置}, howpublished = {公開特許}, year = 2022, month = {}, note = {PCT/JP2022/006613(2022/02/18), WO 2022/190817(2022/09/15)} } @misc{CTT100886514, author = {大見俊一郎}, title = {半導体装置および浮遊ゲートデバイスの製造方法}, howpublished = {公開特許}, year = 2022, month = {}, note = {特願2021-082485(2021/05/14), 特開2022-175792(2022/11/25)} } @misc{CTT100884606, author = {大見俊一郎}, title = {半導体装置および浮遊ゲートデバイスの製造方法}, howpublished = {公開特許}, year = 2022, month = {}, note = {特願2021-028111(2021/02/25), 特開2022-129448(2022/09/06)} } @misc{CTT100880502, author = {大見俊一郎}, title = {半導体装置}, howpublished = {公開特許}, year = 2022, month = {}, note = {特願2020-158828(2020/09/23), 特開2022-052432(2022/04/04)} }