@inproceedings{CTT100903419, author = {今井 慎也 and 梶川 亮介 and 川那子 高暢 and 宗田 伊理也 and 角嶋 邦之 and 辰巳 哲也 and 冨谷 茂隆 and 筒井 一生 and 若林 整}, title = {スパッタMoS2膜に対するエッジ金属コンタクトの電流電圧特性}, booktitle = {}, year = 2023, } @inproceedings{CTT100896540, author = {Shinya Imai and Ryo Ono and Iriya Muneta and Kuniyuki Kakushima and Tetsuya Tatsumi and Shigetaka Tomiya and Kazuo Tsutsui and Hitoshi Wakabayashi}, title = {Grain-Size Enlargement of MoS2 Film by Low-Rate Sputtering with Molybdenum Grid}, booktitle = {}, year = 2023, } @inproceedings{CTT100896541, author = {Ryo Ono and Shinya Imai and Takamasa Kawanago and Iriya Muneta and Kuniyuki Kakushima and Kazuo Tsutsui and Tetsuya Tatsumi and Shigetaka Tomiya and Hitoshi Wakabayashi}, title = {Improvement of MoS2 Film Quality by Solid-Phase Crystallization from PVD Amorphous MoSx Film}, booktitle = {}, year = 2023, }