@article{CTT100905515,
  author = {Y. Takamura and H. Nitta and K. Kawahara and T. Kaneko and R. Ishido and T. Miyazaki and N. Hosoda and K. Fujisaki and S. Nakagawa},
  title = {Fabrication of CoFeB–SiO2 Films With Large Uniaxial Anisotropy by Facing Target Sputtering and its Application to High-Frequency Planar-Type Spiral Inductors},
  journal = {IEEE Transactions on Magnetics},
  year = 2023,
}

@inproceedings{CTT100891377,
  author = {Y. Takamura and H. Nitta and K. Kawahara and T. Kaneko and R. Ishido and T. Miyazaki and N. Hosoda and K. Fujisaki and S. Nakagawa},
  title = {Fabrication of CoFeB-SiO2 films with large uniaxial anisotropic by facing target sputtering and its application to high frequency planar type spiral inductors},
  booktitle = {Intermag 2023 Digest Book},
  year = 2023,
}

@inproceedings{CTT100887540,
  author = {仁田帆南 and 金子忠幸 and 河原和馬 and 石戸亮祐 and 宮﨑達也 and 細田尚揮 and 藤﨑敬介 and 中川茂樹 and 高村陽太},
  title = {対向ターゲット式スパッタで作製したCoFeB-SiO2薄膜を用いた長方形スパイラルインダクタ},
  booktitle = {},
  year = 2023,
}