@article{CTT100911315,
  author = {Mina Sato and Mie Tohnishi and Akihiro Matsutani},
  title = {Microfabrication of Si by KOH Etchant Using Etching Masks Amorphized by Ion Beam Extracted From Electron Cyclotron Plasma},
  journal = {Sensors and Materials},
  year = 2024,
}

@inproceedings{CTT100911001,
  author = {遠西美重 and 松下祥子 and 松谷晃宏},
  title = {Deep-RIEで作製したブラックGeの微細構造側壁のスキャロップ深さと反射率との関係},
  booktitle = {},
  year = 2024,
}

@inproceedings{CTT100911026,
  author = {松谷晃宏 and 遠西美重 and 吉田 桜子},
  title = {OsコーティングによるSU-8膜の梁構造の機械的強度の向上},
  booktitle = {},
  year = 2024,
}

@inproceedings{CTT100911048,
  author = {佐藤美那 and 遠西美重 and 松谷晃宏},
  title = {イオンビーム照射によりアモルファス化したSi表面のXRR測定},
  booktitle = {},
  year = 2024,
}